SIGA Precursor supply systems, Actual system image, visually enhanced using AI; errors may occur.
Precursor supply system – G504 platform
Die Precursor Versorgungssysteme G504 dienen der sicheren Versorgung von CVD, PECVD und ALD Verdampfersystemen oder Flüssigdosiersystemen mit flüssigen Chemikalien wie Silanen und Metallalkylen wie SiCl4, TiCl4, SiHCl3, HMDSO, HMDSN, TMDSO, DEZ oder TMA.
Based on our established G504 platform, we offer various configurations of refill systems, starting with our standard systems G504-010 for one precursor and G504-020 for two precursors. Various options for supplying multiple plants are available. The design, housed in a fireproof cabinet, allows installation in any environment close to the consumer system.
- Precursor Versorgung mit Reinheit bis 100%
- Application-oriented and tailor-made
- Continuous supply thanks to multiple containers
- Automatic container changeover
- Permanently technically leak-proof
- System G504-100 for one precursor evaporator
- System G504-200 for two precursor evaporators
- 10 weeks delivery time
- Choose our standard systems with one or two
- Installation directly in the laboratory thanks to Type 90 safety cabinet
Precursor supply system
G505-100 for one precursor
For systems and processes utilizing one precursor, our G504-100 supply system offers an efficient, space-optimized, and cost-effective solution. It ensures a continuous supply of precursor to your process, with refilling adjusted according to consumption to prevent any process disruptions.
- High purity thanks to UHP components
- Can be customised to suit customer requirements
- Integrated rinse routines for safe and long-lasting operation
- Permanently technically leak-proof thanks to faceseal technology
- Price on request
- Approx. 10 weeks delivery time
- Installation directly in the laboratory thanks to Type 90 safety cabinet
Our G504-010 precursor refill system allows the container to be placed directly on a set of scales, so that the fill level can always be monitored. The fluidic system enables the refill lines to be flushed, thereby protecting the user and the system from reactive vapours during operation and maintenance.
Technical specifications G504-100 supply system for one precursor
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Feature
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Technical specifications G504-100 refill system for one precursor
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Dimensions H x W x D (mm)
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1900; 600; 600
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Supply rate
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150-200 ml/min
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Temperature range
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20-75 °C
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Capacity
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xx l
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Precursor Chemikalien
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Siliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)
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Supply on Nitrogen, purge exhaust necessary
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100 Nl/h und 2 bar ü
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Compressed air supply
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6 bar ü
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Supply voltage
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230 V
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Extraction rate of housing
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5 m³/h
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Ex class
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None, due to permanent tightness
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Permanently leak-tight thanks to stainless steel piping
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Type 90 safety cabinet
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Inlet filter for N2
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With purge function for safe container replacement
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G504-200 precursor supply system for two precursors
Our G504-200 precursor supply system can deliver from multiple containers simultaneously. This enables a completely continuous process supply by switching between containers of the same precursor. Alternative configurations allow the use of two independent containers to supply different processes. This saves installation space and reduces the number of components while simultaneously enhancing process reliability.
- Supply to one system comprising several precursor containers
- High purity thanks to UHP components
- Can be customised to suit customer requirements
- Integrated rinse routines for safe and long-lasting operation
- Various precursor chemicals possible thanks to independent lines
- Continuous supply thanks to multiple containers
- Automatic container changeover
- Permanently technically leak-proof thanks to faceseal technology
- Price on request
- Approx. 10 weeks delivery time
- Installation directly in the laboratory thanks to Type 90 safety cabinet
Our G504-200 precursor supply system is housed in an F90 fire-resistant cabinet, allowing it to be installed in the laboratory.
Technical specifications G504-200 supply system for two precursors
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Feature
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Technical specifications G504-200 supply system for two precursors
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|---|---|
|
Dimensions H x W x D (mm)
|
1900; 600; 600
|
|
Supply rate
|
150-200 ml/min
|
|
Temperature range
|
20-75 °C
|
|
Capacity
|
xx l
|
|
Precursor Chemikalien
|
Siliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)
|
|
Supply on Nitrogen, purge exhaust necessary
|
100 Nl/h und 2 bar ü
|
|
Compressed air supply
|
6 bar ü
|
|
Supply voltage
|
230 V
|
|
Extraction rate of housing
|
5 m³/h
|
|
Ex class
|
None, due to permanent tightness
|
|
Permanently leak-tight thanks to stainless steel piping
|
|
|
Type 90 safety cabinet
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|
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Inlet filter for N2
|
|
|
With purge function for safe container replacement
|
|
Technical description
Refill systems are used to ensure a reliable supply of the liquid chemicals used in applications such as liquid dosing systems or evaporator systems. These include silanes, chlorides and metal alkyls such as SiCl₄, TiCl₄, SiHCl₃, HMDSO, DEZ or TMA. The system is designed on an application-specific basis and can be adapted to the particular requirements of each application.
The supply system can be designed for a single container or, to ensure an uninterrupted supply, equipped to handle two containers. Automatic switchover occurs as soon as the first container is empty.
The transport vessel is installed in a cabinet and securely connected to the pipework there. The system’s valves are pneumatically operated and controlled by an automatic sequence controller.
Once a new transport vessel has been installed, the connecting lines are pressurized and subjected to a pressure-retention test to verify the secure connection of the container. After successfully passing this test, the connecting lines are purged using an automated pressure-swing purging process (alternately pressurizing the lines with N2 and evacuating them). Diaphragm valves are used to facilitate this purging process. Finally, the new vessel is released for supplying the connected consumers.
Once a new transport vessel has been installed, the connecting pipes are first pressurised and subjected to a pressure retention test to confirm that the vessel is securely connected. Once this test has been passed, the connecting pipes are purged by means of an automated pressure-switch flushing process (alternately pressurising the pipes with N₂ and then evacuating them). Diaphragm valves are used to facilitate the purging process. The new drum is then authorised to supply the connected consumers.
During the automatic rinsing sequences carried out when changing drums, the manual valves on the transport vessel must be opened and closed. The operator receives instructions to do so from the control unit.
The transport vessel is placed on a set of scales, so that the remaining contents can always be displayed. If the vessel is almost empty, the operator is warned; when the lowest fill mark is reached, a further message is displayed; in systems with two transport vessels, the system automatically switches to the vessel on standby.
A sheet steel housing or a Type 90 safety cabinet (90-minute fire resistance) can be used as the housing for the refilling system. This allows the system to be installed directly in laboratories and workrooms. The cabinets are connected to the extraction system and can be supplied with fresh air as required. To further enhance safety, the supply system can be fitted with a smoke detector or a gas detection sensor, depending on the precursor used.
- Metallic seals and leak-proof: No elastomers in the steam path; orbitally welded stainless steel components (SS316L).
- The Type 90 safety cabinet stores hazardous substances and, in the event of a fire, provides 90 minutes’ protection against the ingress of flames. This means that a Type 90 safety cabinet may be installed directly at the workplace.
- Reduced installation effort: Supplying multiple process points from a single evaporator saves on components, valves, control systems and space.
