Precursor Verdampfer und Gassysteme für Forschung, Entwicklung und Produktion
Sophisticated systems for handling gases and liquids. Thats SIGA.
We are specialized in precursor vaporizers for CVD, PECVD and ALD equipment (TMA, DMZ, HMDS, HMDSN, TMDSO and more).
Our systems have been used in development and production for 30 years.
We build standard and bespoke systems for industry and research based on established standards and innovative solutions.
Proven technology, customer-focused systems.
Precise dosing, gas mixing and the vaporisation of precursors – customised and process-reliable, based on established and innovative technology.
- All Posts
- Produkt
- Back
- Precursor Verdampfer
SIGA evaporation systems are designed to precisely deliver gaseous precursors for CVD and PECVD deposition processes. Evaporation and metering are carried out via a system for direct evaporation and metering. SIGA offers systems utilising any technology, with or without a carrier gas. However, one of our key strengths lies in carrier-gas-free systems.
These supply systems are designed to reliably supply liquid dosing systems or evaporator systems with liquid chemicals such as silanes, chlorides and metal alkyls, including SiCl₄, TiCl₄, SiHCl₃, HMDSO, DEZ and TMA.
Conditioning system / loading station using butane or petrol. The activated carbon filters used in motor vehicles with petrol combustion engines are loaded and purged in accordance with the US CARB and EPA regulations and EC Directive 98/69/EC.
SIGA gas mixing systems enable the precise mixing of technical gases for industrial processes – flexibly configurable, precisely controllable and process-reliable. We assemble bespoke systems based on established components and ensure the appropriate safety concept is in place.
Depending on customer requirements, we also develop and manufacture specialised systems for gas supply, gas mixing and vaporisation processes.
For and in collaboration with national and international research institutions, we develop specialised systems that are already exploring the technologies of tomorrow.
Our services
Customised systems. Comprehensive solutions.
- Customised systems based on a standard modular design
- Standard systems
- Customised solutions
- Maintenance and spare parts supply, support throughout the product’s lifespan, including modifications and repairs
- 3D design, electronics software, hardware and assembly
- Risk analysis and safety concept, support with the operator’s risk assessment
- Documentation and user manual, CE certification
Solutions that really work, based on established standards
SIGA combines over 30 years’ experience in gas technology with modern system development and high quality. Our strength lies in custom system design based on established standards – from the initial concept to a system ready for operation. Every project presents its own unique challenge and expands our toolkit, allowing us to remain innovative.
