Products
Our products – for ambitious processes
SIGA supplies tailored systems for gas vaporization and supply of precursors, for gas dosage and many more applications —precise, safe, and aligned with your processes. For both, production and laboratory. All products are developed according to customer-specific requirements and manufactured in a professional way.
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- Precursor Verdampfer
SIGA vaporization systems are designed to precisely supply precursor vapors for CVD and PECVD deposition processes. Vaporization and dosing are achieved through a direct vaporization and dosing system. SIGA offers systems utilizing a wide range of technologies, with or without carrier gas; however, carrier-gas-free systems are one of our key strengths.
These supply systems serve to reliably supply liquid dosing systems or vaporizer systems with liquid chemicals such as silanes, chlorides, and metal alkyls—including SiCl4, TiCl4, SiHCl3, HMDSO, DEZ, or TMA.
Conditioning system / loading station using butane or gasoline. Activated carbon filters used in motor vehicles with gasoline internal combustion engines are loaded and purged in accordance with US regulations (CARB and EPA) and EC standard 98/69/EC.
SIGA gas mixing systems enable the precise mixing of technical gases for industrial processes—offering flexible configuration, exact control, and process reliability. We assemble customized systems based on established components and ensure the right safety concept is in place.
Depending on customer requirements, we also develop and manufacture custom systems for gas supply, gas mixing, and vaporization processes.
For and with national and international research institutions, we develop specialized systems that are already exploring the technologies of tomorrow.