{"id":2418,"date":"2026-07-16T16:09:14","date_gmt":"2026-07-16T16:09:14","guid":{"rendered":"http:\/\/192.168.2.95\/websiteSIGAtest\/?p=2418"},"modified":"2026-09-15T21:43:37","modified_gmt":"2026-09-15T21:43:37","slug":"precurser-versorgungssysteme","status":"publish","type":"post","link":"https:\/\/www.sigagmbh.de\/en\/precurser-versorgungssysteme\/","title":{"rendered":"Precursor Versorgungssysteme &#8211; Plattform G504"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"2418\" class=\"elementor elementor-2418\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6e312932 elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"6e312932\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-496e8dba\" data-id=\"496e8dba\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-108c41f3 elementor-widget elementor-widget-wpr-post-media\" data-id=\"108c41f3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-post-media.default\">\n\t\t\t\t\t<div class=\"wpr-featured-media-wrap\" data-caption=\"standard\"><div class=\"wpr-featured-media-image\" data-src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Alle-768x425.webp\"><img decoding=\"async\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Alle-768x425.webp\" alt=\"Precursor Versorgungssysteme\"><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5283971 elementor-widget elementor-widget-text-editor\" data-id=\"5283971\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>KI Illustration basierend auf echten Bildern der SIGA GmbH, Nachf\u00fcllsysteme.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-585f29f2 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"585f29f2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-27b472d7\" data-id=\"27b472d7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-52022b5c elementor-widget__width-initial elementor-widget elementor-widget-wpr-post-title\" data-id=\"52022b5c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-post-title.default\">\n\t\t\t\t\t<h1 class=\"wpr-post-title\">Precursor Versorgungssysteme &#8211; Plattform G504<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1d0282ac elementor-widget elementor-widget-text-editor\" data-id=\"1d0282ac\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Die Precursor Versorgungssysteme G504 f\u00fcr Precursor dienen der sicheren Versorgung von CVD,&nbsp; PECVD und ALD Verdampfersystemen oder Fl\u00fcssigdosiersystemen mit fl\u00fcssigen Chemikalien wie Silanen, Chloriden und Metallalkylen wie SiCl4, TiCl4, SiHCl3, HMDSO, DEZ oder TMA.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35aaf99 elementor-widget elementor-widget-text-editor\" data-id=\"35aaf99\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Basierend auf unserer etablierten Plattform G504 bieten wir verschiedene Ausbaustufen von Precursor-Nachf\u00fcllsystemen an beginnend bei unseren Standardsystemen G504-010 f\u00fcr einen Precurser und G504-020 f\u00fcr zwei Precurser. Verschiedene Optionen zur Versorgung mehrer Anlagen sind m\u00f6glich. Der Aufbau im feuerfesten Schrank erlaubt die Unterbringung in beliebigen Umgebungen nah am Verbrauchersystem.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b9af3eb elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"3b9af3eb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Precursor Versorgung mit Reinheit bis 100%<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Application-oriented and tailor-made<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Continuous supply thanks to multiple containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic container changeover<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">System G504-100 for one precursor evaporator<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">System G504-200 for two precursor evaporators<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">8 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">W\u00e4hlen Sie unsere Standardsysteme f\u00fcr einen oder zwei  Beh\u00e4lter<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Aufstellung direkt im Labor dank bel\u00fcftetem Sicherheitsschrank Typ 90<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3545e187 wpr-button-icon-style-inline wpr-button-icon-position-right elementor-widget elementor-widget-wpr-button\" data-id=\"3545e187\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-button.default\">\n\t\t\t\t\t\t\n\t\t\t\n\t\t\n\t\t<div class=\"wpr-button-wrap elementor-clearfix\">\n\t\t<a class=\"wpr-button wpr-button-effect wpr-button-none\" data-text=\"\" href=\"https:\/\/test.sigagmbh.de\/kontakt\/\" id=\"kon-btn\" target=\"_blank\" rel=\"noopener\">\n\t\t\t\n\t\t\t<span class=\"wpr-button-content\">\n\t\t\t\t\t\t\t\t\t<span class=\"wpr-button-text\">Request refill system<\/span>\n\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/span>\n\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\n\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-aa6f256 elementor-widget elementor-widget-spacer\" data-id=\"aa6f256\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5e71826e elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"5e71826e\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b6ab4f7\" data-id=\"b6ab4f7\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-88e23de elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"88e23de\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-4d54fb8\" data-id=\"4d54fb8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b10c67e elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"b10c67e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Precursor Versorgungssystem<br>G504-100 \nf\u00fcr einen Precursor<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ad67de elementor-widget elementor-widget-text-editor\" data-id=\"2ad67de\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>For less complex systems and processes, our compact refill system offers an efficient, space-saving and cost-effective solution. Here, too, it is possible to ensure a continuous supply of precursor by using two containers.\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dd605f1 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"dd605f1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">High purity thanks to UHP components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Can be customised to suit customer requirements<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrated rinse routines for safe and long-lasting operation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof thanks to faceseal technology<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Approx. 10 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Installation directly in the laboratory thanks to Type 90 safety cabinet<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-10d63a5\" data-id=\"10d63a5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9b16f2c elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"9b16f2c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"1535\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-768x1535.png\" class=\"attachment-medium_large size-medium_large wp-image-2541\" alt=\"Precursor Versorgungssystem G504\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-768x1536.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-150x300.png 150w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-512x1024.png 512w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen.png 887w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-69f64ae\" data-id=\"69f64ae\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bd3a4fd elementor-widget elementor-widget-image\" data-id=\"bd3a4fd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"768\" height=\"780\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-768x780.png\" class=\"attachment-medium_large size-medium_large wp-image-2525\" alt=\"Precursor Delivery System GS-504 RI Scheme\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-768x780.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-295x300.png 295w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1.png 976w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a25483a elementor-widget elementor-widget-text-editor\" data-id=\"a25483a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Our G504-010 precursor refill system allows the container to be placed directly on a set of scales, so that the fill level can always be monitored. The fluidic system enables the refill lines to be flushed, thereby protecting the user and the system from reactive vapours during operation and maintenance.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c8f855 elementor-widget elementor-widget-spacer\" data-id=\"6c8f855\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0140d22 elementor-widget elementor-widget-n-accordion\" data-id=\"0140d22\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1310\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1310\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technische Daten Precursor Versorgungssystem G504-100 f\u00fcr einen Precurser  <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1310\" class=\"elementor-element elementor-element-73f93c1 e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"73f93c1\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1310\" class=\"elementor-element elementor-element-824e121 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"824e121\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-23985e0 wpr-data-table-type-custom wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"23985e0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"no\" data-rows-per-page=\"\">\n\n\t\t\n\t\t\t\t\t\t<table class=\"wpr-data-table\" id=\"wpr-data-table\">\n\t\t\t\t\t\t\t\t\n\t\t\t\t<thead>\n\t\t\t\t\t<tr class=\"wpr-table-head-row wpr-table-row\">\n\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-b5972e8\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Merkmal<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-3ff4796\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Daten System G504-100 f\u00fcr einen Precurser Verdampfer<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t\t<\/thead>\n\n\t\t\t\t<tbody>\n\t\t\t\t\t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-bc3e7cb wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f333b74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDimensionen H; B; T (mm)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d27567e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t1900; 600; 600\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b9dc5a1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e37730f wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tLieferrate\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d78895c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t150-200 ml\/min\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-f0ca0f7 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-54c6686 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTemperaturbereich (Betrieb oder Precursor Temp)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-abf2527 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t20-75 \u00b0C\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-d1dd480 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e5410b4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCapacity\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8dc21aa wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\txx l\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-6cb6041 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8e1a2f4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPrecursor Chemikalien\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-82e8296 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSiliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-09faf18 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-af3a183 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tAnschluss an eine N2 Sp\u00fclleitung notwendig\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-a7a3863 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t100 Nl\/h und 2 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-dbef48d wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-1d7012c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCompressed air supply\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-337cb8e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t6 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-0e5b4d1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-109a9b7 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply voltage\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-44c63e0 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t230 V\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-122224e wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-fe95fd9 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tGeh\u00e4useabsaugung\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-7ade8ef wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t5 m\u00b3\/h\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-55fc8d5 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-c805913 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEx-Schutz Klasse\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f381636 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tContent\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-c72d7d5 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-2cf2320 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDauerhaft technisch dicht dank Edelstahl-Verrohrung\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-ea15bc9 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d386d74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTyp 90 Sicherheitsschrank\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b48ffcd wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-93b22b6 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEingangsfilter f\u00fcr N2\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-482103c wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d163f82 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tMit Umsp\u00fclfunktion f\u00fcr den sicheren Gebindewechsel\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t<\/tbody>\n\t\t\t<\/table>\n\t\t<\/div>\n\t\t<\/div>\n    \t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8c09238 elementor-widget elementor-widget-image\" data-id=\"8c09238\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"668\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-668x1024.png\" class=\"attachment-large size-large wp-image-3028\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-668x1024.png 668w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-196x300.png 196w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1.png 767w\" sizes=\"(max-width: 668px) 100vw, 668px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7fb6f96 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"7fb6f96\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-466c1cc\" data-id=\"466c1cc\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8a5dfd4 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"8a5dfd4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-e62acda\" data-id=\"e62acda\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-00936c1 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"00936c1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Precursor Versorgungssystem G504-200 f\u00fcr zwei Precursor<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45e4b54 elementor-widget elementor-widget-text-editor\" data-id=\"45e4b54\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Unser Precursor Nachf\u00fcllsystem kann gleichzeitig mehrere Prozesskammern oder Einspeisepunkte versorgen. Dies geschieht entweder \u00fcber parallele Leitungen oder \u00fcber Verteilpunkte innerhalb einer Anlage. Das spart Bauraum und Komponenten, bei gleichzeitiger Steigerung der Prozesssicherheit. In dieser Konfiguration werden mehrere Gebinde empfohlen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-727be1c elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"727be1c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Supply to one system comprising several precursor containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">High purity thanks to UHP components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Can be customised to suit customer requirements<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrated rinse routines for safe and long-lasting operation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Various precursor chemicals possible thanks to independent lines <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Continuous supply thanks to multiple containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic container changeover<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof thanks to faceseal technology<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Approx. 10 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Installation directly in the laboratory thanks to Type 90 safety cabinet<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0cf0b4a elementor-widget elementor-widget-image\" data-id=\"0cf0b4a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"658\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-768x658.png\" class=\"attachment-medium_large size-medium_large wp-image-2526\" alt=\"Precursor Versorgungssystem G504-200 Gasplan\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-768x658.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-300x257.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-1024x878.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1.png 1259w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4308c56\" data-id=\"4308c56\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d96d941 elementor-widget elementor-widget-image\" data-id=\"d96d941\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-768x1024.png\" class=\"attachment-medium_large size-medium_large wp-image-2540\" alt=\"Precursor Versorgungssystem G504-200\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-768x1024.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-225x300.png 225w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen.png 1086w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b89530e elementor-widget elementor-widget-text-editor\" data-id=\"b89530e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Unser Precursor Versorgungssystem G504-200 ist in einem feuerfesten Schrank F90 aufgebaut und erlaubt damit die Aufstellung im Labor. Das System kann ein System mit zwei Precursorn versorgen.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-f1311f9 elementor-widget elementor-widget-spacer\" data-id=\"f1311f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-07f9504 elementor-widget elementor-widget-n-accordion\" data-id=\"07f9504\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-8360\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-8360\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technische Daten Precursor Versorgungssystem G504-200 f\u00fcr zwei Precursor <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-8360\" class=\"elementor-element elementor-element-df0fb8c e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"df0fb8c\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-8360\" class=\"elementor-element elementor-element-ef9a014 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"ef9a014\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-674fb5c wpr-data-table-type-custom wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"674fb5c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"no\" data-rows-per-page=\"\">\n\n\t\t\n\t\t\t\t\t\t<table class=\"wpr-data-table\" id=\"wpr-data-table\">\n\t\t\t\t\t\t\t\t\n\t\t\t\t<thead>\n\t\t\t\t\t<tr class=\"wpr-table-head-row wpr-table-row\">\n\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-b5972e8\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Merkmal<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-3ff4796\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Daten System G504-200 f\u00fcr zwei Precurser Verdampfer<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t\t<\/thead>\n\n\t\t\t\t<tbody>\n\t\t\t\t\t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-bc3e7cb wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f333b74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDimensionen H; B; T (mm)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d27567e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t1900; 600; 600\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b9dc5a1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e37730f wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tLieferrate\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d78895c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t150-200 ml\/min\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-f0ca0f7 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-54c6686 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTemperaturbereich (Betrieb oder Precursor Temp)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-abf2527 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t20-75 \u00b0C\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-d1dd480 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e5410b4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCapacity\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8dc21aa wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\txx l\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-6cb6041 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8e1a2f4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPrecursor Chemikalien\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-82e8296 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSiliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-09faf18 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-af3a183 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tAnschluss an eine N2 Sp\u00fclleitung notwendig\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-a7a3863 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t100 Nl\/h und 2 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-dbef48d wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-1d7012c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCompressed air supply\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-337cb8e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t6 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-0e5b4d1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-109a9b7 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply voltage\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-44c63e0 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t230 V\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-122224e wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-fe95fd9 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tGeh\u00e4useabsaugung\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-7ade8ef wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t5 m\u00b3\/h\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-55fc8d5 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-c805913 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEx-Schutz Klasse\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f381636 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tContent\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-c72d7d5 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-2cf2320 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDauerhaft technisch dicht dank Edelstahl-Verrohrung\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-ea15bc9 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d386d74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTyp 90 Sicherheitsschrank\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b48ffcd wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-93b22b6 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEingangsfilter f\u00fcr N2\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-482103c wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d163f82 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tMit Umsp\u00fclfunktion f\u00fcr den sicheren Gebindewechsel\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t<\/tbody>\n\t\t\t<\/table>\n\t\t<\/div>\n\t\t<\/div>\n    \t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9febc8d elementor-widget elementor-widget-image\" data-id=\"9febc8d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"766\" height=\"908\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1.png\" class=\"attachment-large size-large wp-image-2634\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1.png 766w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1-253x300.png 253w\" sizes=\"(max-width: 766px) 100vw, 766px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5db4579a elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"5db4579a\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6f7b90d7\" data-id=\"6f7b90d7\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ffd0f95 elementor-widget elementor-widget-heading\" data-id=\"ffd0f95\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Technical description<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6cdc840f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"6cdc840f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1dc5ea99 elementor-widget elementor-widget-text-editor\" data-id=\"1dc5ea99\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">Precursor Versorgungssysteme dienen der sicheren Versorgung von Verbrauchern wie CVD \/ PECVD \/ ALD Verdampfersystemen oder Fl\u00fcssigdosiersystemen, mit den dort eingesetzten fl\u00fcssigen Chemikalien. Diese sind Silane, Chloride und Metallalkyle wie SiCl<sub>4<\/sub>, TiCl<sub>4<\/sub>, SiHCl<sub>3<\/sub>, HMDSO, DEZ oder TMA . Die Auslegung des Systems erfolgt anwendungsspezifisch und kann jeweils den besonderen Erfordernissen jeder Applikation angepasst werden.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The supply system can be designed for a single container or, to ensure an uninterrupted supply, equipped to handle two containers. Automatic switchover occurs as soon as the first container is empty.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The transport vessel is installed in a cabinet and securely connected to the pipework there. The system\u2019s valves are pneumatically operated and controlled by an automatic sequence controller.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">Wurde ein neues Transportgef\u00e4\u00df eingebaut, so werden zun\u00e4chst die Anschlussleitungen unter Druck gesetzt und einem Druckhaltetest unterzogen um den sicheren Anschluss des Gebindes zu best\u00e4tigen. Nachdem dieser Test bestanden wurde werden die Anschlussleitungen durch eine automatisierte Druckwechselsp\u00fclung freigesp\u00fclt (Beaufschlagen der Leitungen mit N2 und anschie\u00dfendes Evakuieren im Wechsel). Um das Freisp\u00fclen zu erleichtern werden Membranventile eingesetzt. Danach erfolgt die Freigabe des neuen Fasses zur Versorgung der angeschlossenen Verbraucher.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">Once a new transport vessel has been installed, the connecting pipes are first pressurised and subjected to a pressure retention test to confirm that the vessel is securely connected. Once this test has been passed, the connecting pipes are purged by means of an automated pressure-switch flushing process (alternately pressurising the pipes with N\u2082 and then evacuating them). Diaphragm valves are used to facilitate the purging process. The new drum is then authorised to supply the connected consumers.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">During the automatic rinsing sequences carried out when changing drums, the manual valves on the transport vessel must be opened and closed. The operator receives instructions to do so from the control unit.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The transport vessel is placed on a set of scales, so that the remaining contents can always be displayed. If the vessel is almost empty, the operator is warned; when the lowest fill mark is reached, a further message is displayed; in systems with two transport vessels, the system automatically switches to the vessel on standby.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">A sheet steel housing or a Type 90 safety cabinet (90-minute fire resistance) can be used as the housing for the refilling system. This allows the system to be installed directly in laboratories and workrooms. The cabinets are connected to the extraction system and can be supplied with fresh air as required. To further enhance safety, the supply system can be fitted with a smoke detector or a gas detection sensor, depending on the precursor used.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e7ca642 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"e7ca642\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Metallic seals and leak-proof: No elastomers in the steam path; orbitally welded stainless steel components (SS316L).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">The Type 90 safety cabinet stores hazardous substances and, in the event of a fire, provides 90 minutes\u2019 protection against the ingress of flames. This means that a Type 90 safety cabinet may be installed directly at the workplace.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Reduced installation effort: Supplying multiple process points from a single evaporator saves on components, valves, control systems and space.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-41a7b33 elementor-widget elementor-widget-link-in-bio\" data-id=\"41a7b33\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"link-in-bio.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio e-link-in-bio\">\n\t\t\t<div class=\"e-link-in-bio__content\">\n\n\t\t\t\t\t\t<div class=\"e-link-in-bio__identity\">\n\t\t\t\t\t\t\t\t\t<div class=\"e-link-in-bio__identity-image e-link-in-bio__identity-image-profile has-style-circle\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"291\" height=\"300\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp\" class=\"e-link-in-bio__identity-image-element\" alt=\"Tobias Metz Gesch\u00e4aftsf\u00fchrer SIGA GmbH\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp 291w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop.webp 600w\" sizes=\"(max-width: 291px) 100vw, 291px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__bio\">\n\t\t\t\t<h2 class=\"e-link-in-bio__heading\">Dr. Ing. Tobias Metz<\/h2>\t\t\t\t<h3 class=\"e-link-in-bio__title\">Managing Director and Sales<\/h3>\t\t\t\t\t\t\t\t<p class=\"e-link-in-bio__description\">Fragen zu Precursor Versorgungssystem, Kontaktieren Sie mich direkt!<\/p>\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__icons has-size-small\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"Telephone\" class=\"e-link-in-bio__icon-link\" href=\"tel:+49%20176%20220%2099%2099%208\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-phone-alt\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M497.39 361.8l-112-48a24 24 0 0 0-28 6.9l-49.6 60.6A370.66 370.66 0 0 1 130.6 204.11l60.6-49.6a23.94 23.94 0 0 0 6.9-28l-48-112A24.16 24.16 0 0 0 122.6.61l-104 24A24 24 0 0 0 0 48c0 256.5 207.9 464 464 464a24 24 0 0 0 23.4-18.6l24-104a24.29 24.29 0 0 0-14.01-27.6z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"E-mail\" class=\"e-link-in-bio__icon-link\" href=\"mailto:tobias.metz@sigagmbh.de?subject=Anfrage:%20Verdampfersystem&#038;body=Sehr%20geehrter%20Herr%20Metz,Mit%20freundlichen%20Gr\u00fc\u00dfen,\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-envelope\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M502.3 190.8c3.9-3.1 9.7-.2 9.7 4.7V400c0 26.5-21.5 48-48 48H48c-26.5 0-48-21.5-48-48V195.6c0-5 5.7-7.8 9.7-4.7 22.4 17.4 52.1 39.5 154.1 113.6 21.1 15.4 56.7 47.8 92.2 47.6 35.7.3 72-32.8 92.3-47.6 102-74.1 131.6-96.3 154-113.7zM256 320c23.2.4 56.6-29.2 73.4-41.4 132.7-96.3 142.8-104.7 173.4-128.7 5.8-4.5 9.2-11.5 9.2-18.9v-19c0-26.5-21.5-48-48-48H48C21.5 64 0 85.5 0 112v19c0 7.4 3.4 14.3 9.2 18.9 30.6 23.9 40.7 32.4 173.4 128.7 16.8 12.2 50.2 41.8 73.4 41.4z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a href=\"http:\/\/www.linkedin.com\/in\/tobias-metz-7a51016b\" target=\"_blank\" rel=\"noopener \" aria-label=\"LinkedIn\" class=\"e-link-in-bio__icon-link\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fab-linkedin-in\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M100.28 448H7.4V148.9h92.88zM53.79 108.1C24.09 108.1 0 83.5 0 53.8a53.79 53.79 0 0 1 107.58 0c0 29.7-24.1 54.3-53.79 54.3zM447.9 448h-92.68V302.4c0-34.7-.7-79.2-48.29-79.2-48.29 0-55.69 37.7-55.69 76.7V448h-92.78V148.9h89.08v40.8h1.3c12.4-23.5 42.69-48.3 87.88-48.3 94 0 111.28 61.9 111.28 142.3V448z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<div class=\"e-link-in-bio__ctas has-type-button\">\n\t\t\t\t\t\t\t<a href=\"https:\/\/test.sigagmbh.de\/kontakt\/\" target=\"_blank\" rel=\"noopener \" class=\"e-link-in-bio__cta is-type-button has-corners-rounded\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"e-link-in-bio__cta-text\">\n\t\t\t\t\t\tRequest refill system\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t<\/div>\n\t\t\t<div class=\"e-link-in-bio__bg\">\n\t\t\t\t<div class=\"e-link-in-bio__bg-overlay\"><\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-8b43ec0 e-flex e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-parent\" data-id=\"8b43ec0\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0c5080c elementor-fixed elementor-widget__width-inherit elementor-widget elementor-widget-image\" data-id=\"0c5080c\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;_position&quot;:&quot;fixed&quot;}\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"1870\" height=\"841\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis.png\" class=\"attachment-full size-full wp-image-2886\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis.png 1870w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-300x135.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-1024x461.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-768x345.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-1536x691.png 1536w\" sizes=\"(max-width: 1870px) 100vw, 1870px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>These supply systems serve to reliably supply liquid dosing systems or vaporizer systems with liquid chemicals such as silanes, chlorides, and metal alkyls\u2014including SiCl4, TiCl4, SiHCl3, HMDSO, DEZ, or TMA.\u00a0<\/p>","protected":false},"author":4,"featured_media":3889,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[22],"tags":[],"class_list":["post-2418","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-produkt"],"_links":{"self":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/comments?post=2418"}],"version-history":[{"count":26,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418\/revisions"}],"predecessor-version":[{"id":4504,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418\/revisions\/4504"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media\/3889"}],"wp:attachment":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media?parent=2418"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/categories?post=2418"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/tags?post=2418"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}