{"id":2418,"date":"2026-07-16T16:09:14","date_gmt":"2026-07-16T16:09:14","guid":{"rendered":"http:\/\/192.168.2.95\/websiteSIGAtest\/?p=2418"},"modified":"2026-09-17T16:30:48","modified_gmt":"2026-09-17T16:30:48","slug":"precurser-versorgungssysteme","status":"publish","type":"post","link":"https:\/\/www.sigagmbh.de\/en\/precurser-versorgungssysteme\/","title":{"rendered":"Precursor Versorgungssysteme &#8211; Plattform G504"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"2418\" class=\"elementor elementor-2418\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-6e312932 elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"6e312932\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-496e8dba\" data-id=\"496e8dba\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-108c41f3 elementor-widget elementor-widget-wpr-post-media\" data-id=\"108c41f3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-post-media.default\">\n\t\t\t\t\t<div class=\"wpr-featured-media-wrap\" data-caption=\"standard\"><div class=\"wpr-featured-media-image\" data-src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Alle-768x425.webp\"><img decoding=\"async\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Alle-768x425.webp\" alt=\"Precursor Versorgungssysteme\"><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5283971 elementor-widget elementor-widget-text-editor\" data-id=\"5283971\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>SIGA Precursor supply systems, Actual system image, visually enhanced using AI; errors may occur.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-585f29f2 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"585f29f2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-27b472d7\" data-id=\"27b472d7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-52022b5c elementor-widget__width-initial elementor-widget elementor-widget-wpr-post-title\" data-id=\"52022b5c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-post-title.default\">\n\t\t\t\t\t<h1 class=\"wpr-post-title\">Precursor Versorgungssysteme &#8211; Plattform G504<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1d0282ac elementor-widget elementor-widget-text-editor\" data-id=\"1d0282ac\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Die Precursor Versorgungssysteme G504 dienen der sicheren Versorgung von CVD,\u00a0 PECVD und ALD Verdampfersystemen oder Fl\u00fcssigdosiersystemen mit fl\u00fcssigen Chemikalien wie Silanen und Metallalkylen wie SiCl4, TiCl4, SiHCl3, HMDSO, HMDSN, TMDSO, DEZ oder TMA.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35aaf99 elementor-widget elementor-widget-text-editor\" data-id=\"35aaf99\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Based on our established G504 platform, we offer various configurations of refill systems, starting with our standard systems G504-010 for one precursor and G504-020 for two precursors. Various options for supplying multiple plants are available. The design, housed in a fireproof cabinet, allows installation in any environment close to the consumer system.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3b9af3eb elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"3b9af3eb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Precursor Versorgung mit Reinheit bis 100%<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Application-oriented and tailor-made<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Continuous supply thanks to multiple containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic container changeover<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">System G504-100 for one precursor evaporator<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">System G504-200 for two precursor evaporators<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">10 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Choose our standard systems with one or two<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Installation directly in the laboratory thanks to Type 90 safety cabinet<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3545e187 wpr-button-icon-style-inline wpr-button-icon-position-right elementor-widget elementor-widget-wpr-button\" data-id=\"3545e187\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-button.default\">\n\t\t\t\t\t\t\n\t\t\t\n\t\t\n\t\t<div class=\"wpr-button-wrap elementor-clearfix\">\n\t\t<a class=\"wpr-button wpr-button-effect wpr-button-none\" data-text=\"\" href=\"https:\/\/www.sigagmbh.de\/en\/kontakt\/\" id=\"kon-btn\">\n\t\t\t\n\t\t\t<span class=\"wpr-button-content\">\n\t\t\t\t\t\t\t\t\t<span class=\"wpr-button-text\">Request refill system<\/span>\n\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/span>\n\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\n\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-aa6f256 elementor-widget elementor-widget-spacer\" data-id=\"aa6f256\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5e71826e elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"5e71826e\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b6ab4f7\" data-id=\"b6ab4f7\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-88e23de elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"88e23de\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-4d54fb8\" data-id=\"4d54fb8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b10c67e elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"b10c67e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default translation-block\">Precursor supply system <br> G505-100 for one precursor<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2ad67de elementor-widget elementor-widget-text-editor\" data-id=\"2ad67de\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>For systems and processes utilizing one precursor, our G504-100 supply system offers an efficient, space-optimized, and cost-effective solution. It ensures a continuous supply of precursor to your process, with refilling adjusted according to consumption to prevent any process disruptions.\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dd605f1 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"dd605f1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">High purity thanks to UHP components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Can be customised to suit customer requirements<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrated rinse routines for safe and long-lasting operation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof thanks to faceseal technology<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Approx. 10 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Installation directly in the laboratory thanks to Type 90 safety cabinet<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-10d63a5\" data-id=\"10d63a5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9b16f2c elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"9b16f2c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"1535\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-768x1535.png\" class=\"attachment-medium_large size-medium_large wp-image-2541\" alt=\"Precursor Versorgungssystem G504\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-768x1536.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-150x300.png 150w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen-512x1024.png 512w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Reinraum_mit_Fuessen.png 887w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-69f64ae\" data-id=\"69f64ae\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-bd3a4fd elementor-widget elementor-widget-image\" data-id=\"bd3a4fd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"768\" height=\"780\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-768x780.png\" class=\"attachment-medium_large size-medium_large wp-image-2525\" alt=\"Precursor Delivery System GS-504 RI Scheme\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-768x780.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1-295x300.png 295w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-112-1.png 976w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a25483a elementor-widget elementor-widget-text-editor\" data-id=\"a25483a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Our G504-010 precursor refill system allows the container to be placed directly on a set of scales, so that the fill level can always be monitored. The fluidic system enables the refill lines to be flushed, thereby protecting the user and the system from reactive vapours during operation and maintenance.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c8f855 elementor-widget elementor-widget-spacer\" data-id=\"6c8f855\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0140d22 elementor-widget elementor-widget-n-accordion\" data-id=\"0140d22\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1310\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1310\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications G504-100 supply system for one precursor  <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1310\" class=\"elementor-element elementor-element-73f93c1 e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"73f93c1\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1310\" class=\"elementor-element elementor-element-824e121 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"824e121\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-23985e0 wpr-data-table-type-custom wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"23985e0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t\n\t\t\t\t\t\t<table class=\"wpr-data-table\">\n\t\t\t\t\t\t\t\t\n\t\t\t\t<thead>\n\t\t\t\t\t<tr class=\"wpr-table-head-row wpr-table-row\">\n\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-b5972e8\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Feature<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-3ff4796\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Technical specifications G504-100 refill system for one precursor<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t\t<\/thead>\n\n\t\t\t\t<tbody>\n\t\t\t\t\t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-bc3e7cb wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f333b74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDimensions H x W x D (mm)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d27567e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t1900; 600; 600\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b9dc5a1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e37730f wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply rate\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d78895c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t150-200 ml\/min\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-f0ca0f7 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-54c6686 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTemperature range\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-abf2527 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t20-75 \u00b0C\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-d1dd480 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e5410b4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCapacity\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8dc21aa wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\txx l\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-6cb6041 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8e1a2f4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPrecursor Chemikalien\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-82e8296 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSiliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-09faf18 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-af3a183 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply on Nitrogen, purge exhaust necessary\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-a7a3863 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t100 Nl\/h und 2 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-dbef48d wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-1d7012c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCompressed air supply\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-337cb8e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t6 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-0e5b4d1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-109a9b7 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply voltage\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-44c63e0 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t230 V\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-122224e wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-fe95fd9 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tExtraction rate of housing\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-7ade8ef wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t5 m\u00b3\/h\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-55fc8d5 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-c805913 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEx class\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f381636 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tNone, due to permanent tightness\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-c72d7d5 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-2cf2320 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPermanently leak-tight thanks to stainless steel piping\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-ea15bc9 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d386d74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tType 90 safety cabinet\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b48ffcd wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-93b22b6 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tInlet filter for N2\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-482103c wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d163f82 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tWith purge function for safe container replacement\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t<\/tbody>\n\t\t\t<\/table>\n\t\t<\/div>\n\t\t<\/div>\n    \t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8c09238 elementor-widget elementor-widget-image\" data-id=\"8c09238\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"668\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-668x1024.png\" class=\"attachment-large size-large wp-image-3028\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-668x1024.png 668w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1-196x300.png 196w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-112-Dimensions-1.png 767w\" sizes=\"(max-width: 668px) 100vw, 668px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7fb6f96 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"7fb6f96\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-466c1cc\" data-id=\"466c1cc\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8a5dfd4 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"8a5dfd4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-e62acda\" data-id=\"e62acda\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-00936c1 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"00936c1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">G504-200 precursor supply system for two precursors<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45e4b54 elementor-widget elementor-widget-text-editor\" data-id=\"45e4b54\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Our G504-200 precursor supply system can deliver from multiple containers simultaneously. This enables a completely continuous process supply by switching between containers of the same precursor. Alternative configurations allow the use of two independent containers to supply different processes. This saves installation space and reduces the number of components while simultaneously enhancing process reliability.\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-727be1c elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"727be1c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Supply to one system comprising several precursor containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">High purity thanks to UHP components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Can be customised to suit customer requirements<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrated rinse routines for safe and long-lasting operation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Various precursor chemicals possible thanks to independent lines <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Continuous supply thanks to multiple containers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic container changeover<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof thanks to faceseal technology<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Approx. 10 weeks delivery time<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Installation directly in the laboratory thanks to Type 90 safety cabinet<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0cf0b4a elementor-widget elementor-widget-image\" data-id=\"0cf0b4a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"658\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-768x658.png\" class=\"attachment-medium_large size-medium_large wp-image-2526\" alt=\"Precursor Versorgungssystem G504-200 Gasplan\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-768x658.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-300x257.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1-1024x878.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Precursor-Delivery-System-GS-504-202-1.png 1259w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4308c56\" data-id=\"4308c56\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-d96d941 elementor-widget elementor-widget-image\" data-id=\"d96d941\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-768x1024.png\" class=\"attachment-medium_large size-medium_large wp-image-2540\" alt=\"Precursor Versorgungssystem G504-200\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-768x1024.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen-225x300.png 225w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/G504_Doppelt_offen_Reinraum_mit_Fuessen.png 1086w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b89530e elementor-widget elementor-widget-text-editor\" data-id=\"b89530e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Our G504-200 precursor supply system is housed in an F90 fire-resistant cabinet, allowing it to be installed in the laboratory.\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-f1311f9 elementor-widget elementor-widget-spacer\" data-id=\"f1311f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-07f9504 elementor-widget elementor-widget-n-accordion\" data-id=\"07f9504\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-8360\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-8360\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications G504-200 supply system for two precursors <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-8360\" class=\"elementor-element elementor-element-df0fb8c e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"df0fb8c\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-8360\" class=\"elementor-element elementor-element-ef9a014 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"ef9a014\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-674fb5c wpr-data-table-type-custom wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"674fb5c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t\n\t\t\t\t\t\t<table class=\"wpr-data-table\">\n\t\t\t\t\t\t\t\t\n\t\t\t\t<thead>\n\t\t\t\t\t<tr class=\"wpr-table-head-row wpr-table-row\">\n\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-b5972e8\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Feature<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\n\t\t\t\t\t\t<th class=\"wpr-table-th elementor-repeater-item-3ff4796\" colspan=\"1\">\n\t\t\t\t\t\t\t<div class=\"\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">Technical specifications G504-200 supply system for two precursors<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/th>\n\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t\t<\/thead>\n\n\t\t\t\t<tbody>\n\t\t\t\t\t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-bc3e7cb wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f333b74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tDimensions H x W x D (mm)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d27567e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t1900; 600; 600\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b9dc5a1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e37730f wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply rate\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-d78895c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t150-200 ml\/min\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-f0ca0f7 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-54c6686 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tTemperature range\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-abf2527 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t20-75 \u00b0C\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-d1dd480 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-e5410b4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCapacity\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8dc21aa wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\txx l\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-6cb6041 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-8e1a2f4 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPrecursor Chemikalien\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-82e8296 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSiliciumtetrachlorid (SiCl4), Titan(IV)-chlorid (TiCl4), Trichlorsilan (HSiCl3), Hexamethyldisiloxan HMDSO (C6H18OSi2), Trimethylaluminium TMA (C3H9Al), Diethylzink DEZ (C4H10Zn)\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-09faf18 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-af3a183 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply on Nitrogen, purge exhaust necessary\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-a7a3863 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t100 Nl\/h und 2 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-dbef48d wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-1d7012c wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tCompressed air supply\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-337cb8e wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t6 bar \u00fc\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-0e5b4d1 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-109a9b7 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tSupply voltage\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-44c63e0 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t230 V\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-122224e wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-fe95fd9 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tExtraction rate of housing\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-7ade8ef wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\t5 m\u00b3\/h\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-55fc8d5 wpr-even\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-c805913 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tEx class\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"\" rowspan=\"\" class=\"elementor-repeater-item-f381636 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tNone, due to permanent tightness\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-c72d7d5 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-2cf2320 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tPermanently leak-tight thanks to stainless steel piping\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-ea15bc9 wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d386d74 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tType 90 safety cabinet\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-b48ffcd wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-93b22b6 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tInlet filter for N2\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t\t<tr class=\"wpr-table-body-row wpr-table-row elementor-repeater-item-482103c wpr-odd\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<td colspan=\"2\" rowspan=\"\" class=\"elementor-repeater-item-d163f82 wpr-table-td\">\n\n\t\t\t\t\t\t\t\t<div class=\"wpr-td-content-wrapper\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<span>\n\t\t\t\t\t\t\t\t\t \n\t\t\t\t\t\t\t\t\t\t\t<span class=\"wpr-table-text\">\n\t\t\t\t\t\t\t\t\t\t\t\tWith purge function for safe container replacement\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t\t<\/div>\n\n\t\t\t\t\t\t\t<\/td>\n\t\t\t\t\t\t\t\t\t\t\t\t<\/tr>\n\t\t\t        \t\t\t\t<\/tbody>\n\t\t\t<\/table>\n\t\t<\/div>\n\t\t<\/div>\n    \t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9febc8d elementor-widget elementor-widget-image\" data-id=\"9febc8d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"766\" height=\"908\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1.png\" class=\"attachment-large size-large wp-image-2634\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1.png 766w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-G504-210A-Dimensions-2-1-253x300.png 253w\" sizes=\"(max-width: 766px) 100vw, 766px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-5db4579a elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"5db4579a\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6f7b90d7\" data-id=\"6f7b90d7\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ffd0f95 elementor-widget elementor-widget-heading\" data-id=\"ffd0f95\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Technical description<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6cdc840f elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"6cdc840f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1dc5ea99 elementor-widget elementor-widget-text-editor\" data-id=\"1dc5ea99\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\" class=\"translation-block\">Refill systems are used to ensure a reliable supply of the liquid chemicals used in applications such as liquid dosing systems or evaporator systems. These include silanes, chlorides and metal alkyls such as SiCl\u2084, TiCl\u2084, SiHCl\u2083, HMDSO, DEZ or TMA. The system is designed on an application-specific basis and can be adapted to the particular requirements of each application.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The supply system can be designed for a single container or, to ensure an uninterrupted supply, equipped to handle two containers. Automatic switchover occurs as soon as the first container is empty.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The transport vessel is installed in a cabinet and securely connected to the pipework there. The system\u2019s valves are pneumatically operated and controlled by an automatic sequence controller.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">Once a new transport vessel has been installed, the connecting lines are pressurized and subjected to a pressure-retention test to verify the secure connection of the container. After successfully passing this test, the connecting lines are purged using an automated pressure-swing purging process (alternately pressurizing the lines with N2 and evacuating them). Diaphragm valves are used to facilitate this purging process. Finally, the new vessel is released for supplying the connected consumers.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">Once a new transport vessel has been installed, the connecting pipes are first pressurised and subjected to a pressure retention test to confirm that the vessel is securely connected. Once this test has been passed, the connecting pipes are purged by means of an automated pressure-switch flushing process (alternately pressurising the pipes with N\u2082 and then evacuating them). Diaphragm valves are used to facilitate the purging process. The new drum is then authorised to supply the connected consumers.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">During the automatic rinsing sequences carried out when changing drums, the manual valves on the transport vessel must be opened and closed. The operator receives instructions to do so from the control unit.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">The transport vessel is placed on a set of scales, so that the remaining contents can always be displayed. If the vessel is almost empty, the operator is warned; when the lowest fill mark is reached, a further message is displayed; in systems with two transport vessels, the system automatically switches to the vessel on standby.<\/p><p style=\"margin-top: 0px; color: #333333; font-family: 'Open Sans', sans-serif;\">A sheet steel housing or a Type 90 safety cabinet (90-minute fire resistance) can be used as the housing for the refilling system. This allows the system to be installed directly in laboratories and workrooms. The cabinets are connected to the extraction system and can be supplied with fresh air as required. To further enhance safety, the supply system can be fitted with a smoke detector or a gas detection sensor, depending on the precursor used.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e7ca642 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"e7ca642\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Metallic seals and leak-proof: No elastomers in the steam path; orbitally welded stainless steel components (SS316L).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">The Type 90 safety cabinet stores hazardous substances and, in the event of a fire, provides 90 minutes\u2019 protection against the ingress of flames. This means that a Type 90 safety cabinet may be installed directly at the workplace.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Reduced installation effort: Supplying multiple process points from a single evaporator saves on components, valves, control systems and space.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-41a7b33 elementor-widget elementor-widget-link-in-bio\" data-id=\"41a7b33\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"link-in-bio.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio e-link-in-bio\">\n\t\t\t<div class=\"e-link-in-bio__content\">\n\n\t\t\t\t\t\t<div class=\"e-link-in-bio__identity\">\n\t\t\t\t\t\t\t\t\t<div class=\"e-link-in-bio__identity-image e-link-in-bio__identity-image-profile has-style-circle\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"291\" height=\"300\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp\" class=\"e-link-in-bio__identity-image-element\" alt=\"Tobias Metz Gesch\u00e4aftsf\u00fchrer SIGA GmbH\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp 291w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop.webp 600w\" sizes=\"(max-width: 291px) 100vw, 291px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__bio\">\n\t\t\t\t<h2 class=\"e-link-in-bio__heading\">Dr. Ing. Tobias Metz<\/h2>\t\t\t\t<h3 class=\"e-link-in-bio__title\">Managing Director and Sales<\/h3>\t\t\t\t\t\t\t\t<p class=\"e-link-in-bio__description\">Fragen zu Precursor Versorgungssystem, Kontaktieren Sie mich direkt!<\/p>\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__icons has-size-small\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"Telephone\" class=\"e-link-in-bio__icon-link\" href=\"tel:+49%20176%20220%2099%2099%208\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-phone-alt\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M497.39 361.8l-112-48a24 24 0 0 0-28 6.9l-49.6 60.6A370.66 370.66 0 0 1 130.6 204.11l60.6-49.6a23.94 23.94 0 0 0 6.9-28l-48-112A24.16 24.16 0 0 0 122.6.61l-104 24A24 24 0 0 0 0 48c0 256.5 207.9 464 464 464a24 24 0 0 0 23.4-18.6l24-104a24.29 24.29 0 0 0-14.01-27.6z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"E-mail\" class=\"e-link-in-bio__icon-link\" href=\"mailto:tobias.metz@sigagmbh.de?subject=Anfrage:%20Verdampfersystem&#038;body=Sehr%20geehrter%20Herr%20Metz,Mit%20freundlichen%20Gr\u00fc\u00dfen,\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-envelope\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M502.3 190.8c3.9-3.1 9.7-.2 9.7 4.7V400c0 26.5-21.5 48-48 48H48c-26.5 0-48-21.5-48-48V195.6c0-5 5.7-7.8 9.7-4.7 22.4 17.4 52.1 39.5 154.1 113.6 21.1 15.4 56.7 47.8 92.2 47.6 35.7.3 72-32.8 92.3-47.6 102-74.1 131.6-96.3 154-113.7zM256 320c23.2.4 56.6-29.2 73.4-41.4 132.7-96.3 142.8-104.7 173.4-128.7 5.8-4.5 9.2-11.5 9.2-18.9v-19c0-26.5-21.5-48-48-48H48C21.5 64 0 85.5 0 112v19c0 7.4 3.4 14.3 9.2 18.9 30.6 23.9 40.7 32.4 173.4 128.7 16.8 12.2 50.2 41.8 73.4 41.4z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a href=\"http:\/\/www.linkedin.com\/in\/tobias-metz-7a51016b\" target=\"_blank\" rel=\"noopener \" aria-label=\"LinkedIn\" class=\"e-link-in-bio__icon-link\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fab-linkedin-in\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M100.28 448H7.4V148.9h92.88zM53.79 108.1C24.09 108.1 0 83.5 0 53.8a53.79 53.79 0 0 1 107.58 0c0 29.7-24.1 54.3-53.79 54.3zM447.9 448h-92.68V302.4c0-34.7-.7-79.2-48.29-79.2-48.29 0-55.69 37.7-55.69 76.7V448h-92.78V148.9h89.08v40.8h1.3c12.4-23.5 42.69-48.3 87.88-48.3 94 0 111.28 61.9 111.28 142.3V448z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<div class=\"e-link-in-bio__ctas has-type-button\">\n\t\t\t\t\t\t\t<a href=\"https:\/\/www.sigagmbh.de\/en\/kontakt\/\" target=\"_blank\" rel=\"noopener \" class=\"e-link-in-bio__cta is-type-button has-corners-rounded\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"e-link-in-bio__cta-text\">\n\t\t\t\t\t\tRequest refill system\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t<\/div>\n\t\t\t<div class=\"e-link-in-bio__bg\">\n\t\t\t\t<div class=\"e-link-in-bio__bg-overlay\"><\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t<div class=\"elementor-element elementor-element-8b43ec0 e-flex e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-parent\" data-id=\"8b43ec0\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0c5080c elementor-fixed elementor-widget__width-inherit elementor-widget elementor-widget-image\" data-id=\"0c5080c\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;_position&quot;:&quot;fixed&quot;}\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"1870\" height=\"841\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis.png\" class=\"attachment-full size-full wp-image-2886\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis.png 1870w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-300x135.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-1024x461.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-768x345.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Watzmann07_G504_Anlagen_Halbkreis-1536x691.png 1536w\" sizes=\"(max-width: 1870px) 100vw, 1870px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>These supply systems serve to reliably supply liquid dosing systems or vaporizer systems with liquid chemicals such as silanes, chlorides, and metal alkyls\u2014including SiCl4, TiCl4, SiHCl3, HMDSO, DEZ, or TMA.\u00a0<\/p>","protected":false},"author":4,"featured_media":3889,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[22],"tags":[],"class_list":["post-2418","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-produkt"],"_links":{"self":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/comments?post=2418"}],"version-history":[{"count":42,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418\/revisions"}],"predecessor-version":[{"id":4637,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/2418\/revisions\/4637"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media\/3889"}],"wp:attachment":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media?parent=2418"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/categories?post=2418"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/tags?post=2418"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}