{"id":1765,"date":"2026-07-16T16:10:33","date_gmt":"2026-07-16T16:10:33","guid":{"rendered":"http:\/\/localhost\/websiteSIGAtest\/?p=1765"},"modified":"2026-10-05T10:01:20","modified_gmt":"2026-10-05T10:01:20","slug":"precursor-verdampfer","status":"publish","type":"post","link":"https:\/\/www.sigagmbh.de\/en\/precursor-verdampfer\/","title":{"rendered":"Precursor vapourisation systems"},"content":{"rendered":"<div data-elementor-type=\"wp-post\" data-elementor-id=\"1765\" class=\"elementor elementor-1765\" data-elementor-post-type=\"post\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-f9172eb elementor-reverse-mobile elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"f9172eb\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-5cef556\" data-id=\"5cef556\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-56fdb28 elementor-widget__width-inherit e-transform elementor-widget elementor-widget-wpr-post-media\" data-id=\"56fdb28\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;_transform_scale_effect_hover&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:1.1,&quot;sizes&quot;:[]},&quot;_animation&quot;:&quot;none&quot;,&quot;_transform_scale_effect_hover_tablet&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]},&quot;_transform_scale_effect_hover_mobile&quot;:{&quot;unit&quot;:&quot;px&quot;,&quot;size&quot;:&quot;&quot;,&quot;sizes&quot;:[]}}\" data-widget_type=\"wpr-post-media.default\">\n\t\t\t\t\t<div class=\"wpr-featured-media-wrap\" data-caption=\"standard\"><div class=\"wpr-featured-media-image\" data-src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-768x580.webp\"><img decoding=\"async\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-768x580.webp\" alt=\"Precursor Verdampfer mehrere Prozessausg\u00e4nge 2 RI Schema\"><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ab01024 elementor-widget elementor-widget-text-editor\" data-id=\"ab01024\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Actual system image, visually enhanced using AI; errors may occur.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-167d04a\" data-id=\"167d04a\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e53395d elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"e53395d\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-inner-column elementor-element elementor-element-920e04c\" data-id=\"920e04c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f1f77f0 elementor-widget__width-initial elementor-widget elementor-widget-wpr-post-title\" data-id=\"f1f77f0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-post-title.default\">\n\t\t\t\t\t<h2 class=\"wpr-post-title\">Precursor vapourisation systems<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-de91b92 elementor-widget elementor-widget-text-editor\" data-id=\"de91b92\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p data-start=\"309\" data-end=\"475\">SIGA\u2019s precursor evaporation systems enable the precise, carrier-free dosing and evaporation of liquid chemicals for CVD, PECVD, ALD and other deposition processes \u2013 safely, efficiently and cost-effectively.<\/p><p data-start=\"309\" data-end=\"475\">We respond to our customers\u2019 requirements, develop solutions in line with their specifications and tailor our systems to their needs.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d80df39 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"d80df39\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Direct evaporation without a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporation using a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Mixture following vaporisation with any process gases<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Massenflusskontrolliert oder Charge and Release \u00fcber Puffergef\u00e4\u00df<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Use of all standard technologies: direct evaporators, bubblers, DLI, C&amp;R<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Optimal in Kombination mit unserem Precursor Versorgungssystem G504<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Implementation as permanently sealed systems using metal seals<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Usage of UHP gas components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7e39ca7 wpr-button-icon-style-inline wpr-button-icon-position-right elementor-widget elementor-widget-wpr-button\" data-id=\"7e39ca7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-button.default\">\n\t\t\t\t\t\t\n\t\t\t\n\t\t\n\t\t<div class=\"wpr-button-wrap elementor-clearfix\">\n\t\t<a class=\"wpr-button wpr-button-effect wpr-button-none\" data-text=\"\" href=\"https:\/\/www.sigagmbh.de\/en\/kontakt\/\" id=\"kon-btn\">\n\t\t\t\n\t\t\t<span class=\"wpr-button-content\">\n\t\t\t\t\t\t\t\t\t<span class=\"wpr-button-text\">Request your vaporizer<\/span>\n\t\t\t\t\t\t\t\t\n\t\t\t\t\t\t\t<\/span>\n\t\t<\/a>\n\n\t\t\t\t<\/div>\n\t\n\t\n\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-aa17e87 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"aa17e87\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-9f35bbf\" data-id=\"9f35bbf\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-353bc53 elementor-widget elementor-widget-menu-anchor\" data-id=\"353bc53\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_single\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-0349dd8 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"0349dd8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-61f267c\" data-id=\"61f267c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a346ce0 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"a346ce0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Platform V107 \/ V108 precursor vaporizer for one precursor and one process outlet<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2116903 elementor-widget elementor-widget-text-editor\" data-id=\"2116903\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"font-size: 1rem;\">Our precursor vaporizers, based on the \"baking\" principle, allow for the dosing of the correct amount of precursor without the use of a carrier gas.\u00a0<\/span><\/p><p>The V107\/V108 base system comprises an evaporator with a rinse inlet and one process outlet. Various configuration options are available, such as dosing into a process gas stream and the mixing of different vapours and gases. Where required, features such as controlled inerting of the exhaust gas stream, pressure relief valves, gas sensors, ventilation systems, back-pressure regulators and other process-specific components can be added.\u00a0<\/p><p>There are now more than a dozen versions of the system, which we would be happy to tailor further to your requirements.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7631417 elementor-widget elementor-widget-image\" data-id=\"7631417\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"406\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V108-030A_SinglePrecurser-768x406.png\" class=\"attachment-medium_large size-medium_large wp-image-2986\" alt=\"SIGA Precursor Verdampfer eiinfach RI Schema\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V108-030A_SinglePrecurser-768x406.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V108-030A_SinglePrecurser-300x159.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V108-030A_SinglePrecurser-1024x542.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V108-030A_SinglePrecurser.png 1098w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-3ae1903\" data-id=\"3ae1903\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-809c276 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"809c276\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"768\" height=\"1632\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen-768x1632.webp\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3256\" alt=\"Precursor Verdampfer V108\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen-768x1632.webp 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen-141x300.webp 141w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen-482x1024.webp 482w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen-723x1536.webp 723w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V108_Freigestellt_offen.webp 904w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-33 elementor-inner-column elementor-element elementor-element-22f02fa\" data-id=\"22f02fa\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b8e0c62 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"b8e0c62\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Direct evaporation without a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Mass flow-controlled (typically 3 g\/h to 300 g\/h depending on the medium)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporator vessel 5.2 l, capacity 3.5 l, -1 to +5 bar<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Rinsing function with pressure-switch rinsing<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Fully heated process<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Routines for refilling, rinsing and commissioning<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic in-process refilling, ideal when used in combination with our G504 precursor supply system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Configurable interfaces for control (ADS, Profinet, EtherCAT, WEB-HMI, and many more)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Typical lead time 8\u201316 weeks<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-614ff40 elementor-widget elementor-widget-image\" data-id=\"614ff40\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"768\" height=\"412\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V107_SinglePrecurser_NoRefill-1-768x412.png\" class=\"attachment-medium_large size-medium_large wp-image-2991\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V107_SinglePrecurser_NoRefill-1-768x412.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V107_SinglePrecurser_NoRefill-1-300x161.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V107_SinglePrecurser_NoRefill-1.png 795w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-92b1aa9 elementor-widget elementor-widget-text-editor\" data-id=\"92b1aa9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>The simplest V107\/V108 precursor vapourisation systems allow the vapour to be metered using an MFC from a heated vessel. All pipework is located within a heated area to prevent condensation.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-9ff018c elementor-widget elementor-widget-menu-anchor\" data-id=\"9ff018c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_multi_out\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-37cabe7 elementor-widget elementor-widget-n-accordion\" data-id=\"37cabe7\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-5850\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-5850\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications for the V107\/V108 system with one precurser vaporizer and one process outlet <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-5850\" class=\"elementor-element elementor-element-d65aafd e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"d65aafd\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-5850\" class=\"elementor-element elementor-element-dbbef85 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"dbbef85\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-34f266f wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"34f266f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">Data vaporizer system V107\/V108 with one precursor<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">1900 x 600 x 600<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">Typically 3 g\/h to 300 g\/h depending on the medium (continuous operation with refilling)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">1<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">1<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">Standard up to 55 \u00b0C, extended up to 90 \u00b0C, adaptable up to 140 \u00b0C Capacity<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Capacity<\/td><td class=\"wpr-table-td wpr-table-text\">10 l effective (17 l vessel)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Silicon tetrachloride (SiCl4), titanium (IV) chloride (TiCl4), trichlorosilane (HSiCl3), hexamethyldisiloxane HMDSO (C6H18OSi2), hexamethyldisilazane HMDS (C6H19NSi2), chloro(trimethyl)silane TMCS (C3H9ClSi), trimethyl aluminum TMA (C3H9Al), diethyl zinc DEZ (C4H10Zn), TEOS (C8H20O4Si), titanium tetrachloride (TiCl4), germanim tetrachloride (GeCl4), alcohols, water and much more.<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar gauge pressure of nitrogen (N\u2082) or argon (purity 5.0 for chlorides 5.6), with inlet filter<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No explosion-proof zones as the system is permanently technically leak-tight<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, spring-return valves in the event of power failure and emergency stop, options for ventilation, flame monitors and gas sensors<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with integrated, enclosed, heated evaporator compartment and independent, enclosed electrical cabinet.<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for in-process refilling, refill trigger via scale; recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, secure ADS, Profinet, RS485; capable of triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-07a7f2f elementor-widget elementor-widget-image\" data-id=\"07a7f2f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"610\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V108-030A-Dimensions-610x1024.webp\" class=\"attachment-large size-large wp-image-3118\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V108-030A-Dimensions-610x1024.webp 610w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V108-030A-Dimensions-179x300.webp 179w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V108-030A-Dimensions.png 687w\" sizes=\"(max-width: 610px) 100vw, 610px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7d0c273 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"7d0c273\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-645b73c\" data-id=\"645b73c\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-817ff87 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"817ff87\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-342cd71\" data-id=\"342cd71\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-e4793af elementor-widget elementor-widget-menu-anchor\" data-id=\"e4793af\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_multi_out\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f2da674 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"f2da674\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Precursor vaporizer for a precursor and multiple process outlets 107\/108-200<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2874773 elementor-widget elementor-widget-text-editor\" data-id=\"2874773\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>The ability to supply multiple consumers from a single evaporator makes it possible to build complex systems in a more compact manner and to utilise a shared evaporator source with the same medium. Overall, this reduces complexity and, consequently, costs and maintenance requirements, whilst increasing robustness.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-515c9c8 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"515c9c8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Direkte Precursor Verdampfen ohne Tr\u00e4gergas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Mass flow-controlled (typically 3 g\/h to 300 g\/h depending on the medium)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">up to 10 process outputs possible<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporator vessel 17 l, capacity 10 l, -1 to +5 bar<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporator temperature up to 45 \u00b0C (temperatures up to 150 \u00b0C on request), monitored by a safety temperature limiter<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Applications e.g. HDMSO, HDMSN, TDMSO, TMA, DEZ, and many more<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Heated zone up to 50 \u00b0C (higher temperatures up to 140 \u00b0C on request)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Supply to multiple consumers from a single evaporator<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof and ultra-high purity thanks to UHP components<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">CPU-controlled with HMI and remote controllability via ADS, EtherCAT, Profinet by arrangement, Web HMI<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic in-process refilling, ideal when used in combination with our G504 precursor supply system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request, depending on configuration<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Delivery time from 12\u201316 weeks<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fae8813 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"fae8813\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"472\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporize_V108-051B_MetalAlkylPrecursor_multipleOutlet-768x472.png\" class=\"attachment-medium_large size-medium_large wp-image-2980\" alt=\"Precursor Verdampfer mehrere Prozessausg\u00e4nge RI Schema\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporize_V108-051B_MetalAlkylPrecursor_multipleOutlet-768x472.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporize_V108-051B_MetalAlkylPrecursor_multipleOutlet-300x184.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporize_V108-051B_MetalAlkylPrecursor_multipleOutlet-1024x629.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporize_V108-051B_MetalAlkylPrecursor_multipleOutlet.png 1228w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-503b210\" data-id=\"503b210\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-181f7f7 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"181f7f7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"666\" height=\"1390\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA03_20170914_133355_Weiss_Gerade.webp\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3532\" alt=\"Precursor Verdampfer mehrere Prozessausg\u00e4nge\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA03_20170914_133355_Weiss_Gerade.webp 666w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA03_20170914_133355_Weiss_Gerade-144x300.webp 144w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA03_20170914_133355_Weiss_Gerade-491x1024.webp 491w\" sizes=\"(max-width: 666px) 100vw, 666px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4813722 elementor-widget elementor-widget-text-editor\" data-id=\"4813722\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Evaporator system, V107 variant, with 3 independent process outputs for metal alkyl evaporators.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-6f65ffb elementor-widget elementor-widget-n-accordion\" data-id=\"6f65ffb\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1160\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1160\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications of the vaporizer system for one precursor and multiple process outlets  <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1160\" class=\"elementor-element elementor-element-6aa03ce e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"6aa03ce\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1160\" class=\"elementor-element elementor-element-19e8e67 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"19e8e67\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-1ea0934 wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"1ea0934\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">Data System V107\/V108 with one precursor and multiple process outputs<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">1900 x 1200 x 600<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">Typically 3 g\/h to 300 g\/h depending on the medium (continuous operation with refilling)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">1<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">2 to 10<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">Standard up to 55 \u00b0C, extended up to 90 \u00b0C, adaptable up to 140 \u00b0C Capacity<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Capacity<\/td><td class=\"wpr-table-td wpr-table-text\">10 l effective (17 l vessel)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Silicon tetrachloride (SiCl4), titanium (IV) chloride (TiCl4), trichlorosilane (HSiCl3), hexamethyldisiloxane HMDSO (C6H18OSi2), hexamethyldisilazane HMDS (C6H19NSi2), chloro(trimethyl)silane TMCS (C3H9ClSi), trimethyl aluminum TMA (C3H9Al), diethyl zinc DEZ (C4H10Zn), TEOS (C8H20O4Si), titanium tetrachloride (TiCl4), germanim tetrachloride (GeCl4), alcohols, water and much more.<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar gauge pressure of nitrogen (N\u2082) or argon (purity 5.0 for chlorides 5.6), with inlet filter<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No explosion-proof zones as the system is permanently technically leak-tight<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, spring-return valves in the event of a power failure or emergency stop, ventilation options, gas sensors<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with integrated, enclosed, heated evaporator compartment and independent, enclosed electrical cabinet.<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for in-process refilling, refill trigger via scale; recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, Secure ADS, Profinet, RS485 supported. Triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ae94710 elementor-widget elementor-widget-image\" data-id=\"ae94710\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"654\" height=\"944\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V107G-051A-Dimensions.png\" class=\"attachment-large size-large wp-image-4014\" alt=\"Precursor Verdampfer System V107G-051A Dimensions\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V107G-051A-Dimensions.png 654w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V107G-051A-Dimensions-208x300.webp 208w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V107G-051A-Dimensions-8x12.webp 8w\" sizes=\"(max-width: 654px) 100vw, 654px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-24b7c54 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"24b7c54\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4d5a439\" data-id=\"4d5a439\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-754f1a4 elementor-widget elementor-widget-menu-anchor\" data-id=\"754f1a4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_multi_multi\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-653d373 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"653d373\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4c94720\" data-id=\"4c94720\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-41714ea elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"41714ea\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Platform V111 precursor vaporizer system \nfor two or more precursors to be mixed with process gases<br><\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f3139cd elementor-widget elementor-widget-text-editor\" data-id=\"f3139cd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p class=\"translation-block\">If a separation process involves the separation of several components that are present as liquids and are mixed with process gases or metered alternately, this platform allows for the full range of combinations, whilst also enabling multiple process outputs to be managed. The example shows a system with 2 evaporators and 6 process outputs, each of which meters independently. The platform has been built on numerous occasions and can be further adapted.<\/p><p>The system can also be adapted to different process gases through the use of multi-range and multi-gas MFCs.\u00a0<\/p><p>By combining multiple components within a single system, it is possible to achieve a simply coordinated control system and to build a more compact system, which, taken together, reduces costs, maintenance requirements and integration efforts.<\/p><p>Internal connections improve reliability. MFC lines can be configured with redundancy to facilitate maintenance during continuous operation.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e5e89d7 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"e5e89d7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"565\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V111_324_Water_MetalAlkylPrecursor_multiOutlet-768x565.webp\" class=\"attachment-medium_large size-medium_large wp-image-3222\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V111_324_Water_MetalAlkylPrecursor_multiOutlet-768x565.webp 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V111_324_Water_MetalAlkylPrecursor_multiOutlet-300x221.webp 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V111_324_Water_MetalAlkylPrecursor_multiOutlet-1024x753.webp 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_V111_324_Water_MetalAlkylPrecursor_multiOutlet.webp 1124w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-18a5eae\" data-id=\"18a5eae\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-689e6d3 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"689e6d3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Direct evaporation without a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Mass flow-controlled (typically 3 g\/h to 300 g\/h depending on the medium)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporator vessel 10 l, capacity 7 l, -1 to +5 bar<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Mixture of several process gases<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Heated fluidic chamber prevents condensation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Combination of multiple evaporators, multiple process gases and multiple process outlets<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic in-process refilling, ideal when used in combination with our G504 precursor supply system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-47daee2 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"47daee2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"580\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-768x580.webp\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3227\" alt=\"Precursor Verdampfer mehrere Prozessausg\u00e4nge 2 RI Schema\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-768x580.webp 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-300x227.webp 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade-1024x773.webp 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V111-320-0511_Weiss_Gerade.webp 1443w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-c021f66 elementor-widget elementor-widget-n-accordion\" data-id=\"c021f66\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-2010\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-2010\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications for the V111 system for two or more precursors  <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-2010\" class=\"elementor-element elementor-element-c78b630 e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"c78b630\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-2010\" class=\"elementor-element elementor-element-42888d1 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"42888d1\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f910036 wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"f910036\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">System V111 for the direct evaporation of multiple precursors and mixing with process gases <\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">1900 x 1200 x 600<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">Typically 3 g\/h to 300 g\/h depending on the medium (continuous operation with refilling)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">2<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">Adaptable from 2 x 1 to 2 x 6<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Additional process gases<\/td><td class=\"wpr-table-td wpr-table-text\">2 +X e.g. H2, B2H6<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">Standard up to 55 \u00b0C, extended up to 90 \u00b0C, adaptable up to 140 \u00b0C <\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Capacity<\/td><td class=\"wpr-table-td wpr-table-text\">7 l effective (10 l vessel)<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Silicon tetrachloride (SiCl\u2084), titanium(IV)-chloride (TiCl\u2084), trichlorosilane (HSiCl\u2083), hexamethyldisiloxane HMDSO (C\u2086H\u2081\u2088OSi\u2082), hexamethyldisilazane HMDS (C\u2086H\u2081\u2089NSi\u2082), chlorotrimethylsilane TMCS (C\u2083H\u2089ClSi), trimethylaluminium TMA (C\u2083H\u2089Al), diethylzinc DEZ (C\u2084H\u2081\u2080Zn), TEOS (C\u2088H\u2082\u2080O\u2084Si), titanium tetrachloride (TiCl\u2084), germanium- tetrachloride (GeCl\u2084), alcohols, water and much more.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar gauge pressure of nitrogen (N\u2082) or argon (purity 5.0 for chlorides 5.6), with inlet filter<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No explosion-proof zones as the system is permanently technically leak-tight<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, spring-return valves in the event of a power failure or emergency stop, ventilation options, gas sensors<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with independently heated evaporator compartments and a heated gas distribution area.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for in-process refilling, refill trigger via scale; recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, Secure ADS, Profinet, RS485 supported. Triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4138794 elementor-widget elementor-widget-image\" data-id=\"4138794\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"800\" height=\"1000\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V111-Dimensions-819x1024.webp\" class=\"attachment-large size-large wp-image-3070\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V111-Dimensions-819x1024.webp 819w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V111-Dimensions-240x300.webp 240w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V111-Dimensions-768x960.webp 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V111-Dimensions.webp 1122w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-45c5710 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"45c5710\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-f70c7c0\" data-id=\"f70c7c0\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-3e1daf2 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"3e1daf2\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-49afa60\" data-id=\"49afa60\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cf5c94e elementor-widget elementor-widget-menu-anchor\" data-id=\"cf5c94e\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_charge_and_release\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7baa4ef elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"7baa4ef\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default translation-block\">Precursor vaporizer system by <br>Charge &amp; Release from buffer tanks<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2c164fb elementor-widget elementor-widget-text-editor\" data-id=\"2c164fb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>As an alternative to dosing via an MFC, defined quantities of vapour can also be dispensed quickly using the \u2018charge and release\u2019 method from buffer vessels. This is particularly useful when defined quantities need to be dispensed within a short time. The \u2018charge and release\u2019 method is a viable solution for both small quantities dispensed quickly (e.g. ALD) and large quantities dispensed quickly.<\/p><p class=\"translation-block\">A set pressure is built up in the buffer vessel from the evaporator. Valves close off the path to the evaporator. As required, other valves open the path to the process chamber. The vapour then flows from the buffer vessel into the chamber. The volume of the buffer vessel and the change in pressure during discharge allow the precursor vapour to be metered in a reproducible manner. The pressure build-up in the buffer vessel can be controlled, and processes can be further varied by diluting the vapour with a carrier gas.<\/p><p class=\"translation-block\">This offers a wide range of control options for achieving precise and stable dosing processes. As the process operates entirely without MFCs, this system can also handle temperatures in excess of 200\u00b0C.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2cbf82d elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"2cbf82d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Direct evaporation without a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Volume-controlled via buffer volume, filling pressure and discharge pressure (time)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Process gases can be mixed in the buffer vessel<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">No MFC required<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Temperatures above 200\u00b0C possible<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporator vessels from 0.5 l to 30 l<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Buffer vessels from &lt; 0.1 l up to 30 l (larger sizes available on request)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Multiple evaporators per system and\/or multiple buffer vessels connected to a single evaporator possible<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic in-process refilling, ideal when used in combination with our G504 precursor supply system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Prices on request, depending on configuration<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Delivery within 8 to 16 weeks, depending on the configuration level<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-40b4fef\" data-id=\"40b4fef\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8bde123 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"8bde123\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA05_20180206_124115_Weiss_Gerade-768x1024.png\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-2998\" alt=\"Charge and Release System f\u00fcr ALD\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA05_20180206_124115_Weiss_Gerade-768x1024.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA05_20180206_124115_Weiss_Gerade-225x300.png 225w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/EVA05_20180206_124115_Weiss_Gerade.png 1086w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-cb04edb elementor-widget elementor-widget-text-editor\" data-id=\"cb04edb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>SIGA GmbH\u2019s Charge &amp; Release systems enable the controlled delivery of steam volumes and steam pulses without the need for an MFC.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7684032 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"7684032\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"514\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-768x514.png\" class=\"attachment-medium_large size-medium_large wp-image-2999\" alt=\"Charge and Release System f\u00fcr ALD RI Schema\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-768x514.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-300x201.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-1024x686.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-1536x1029.png 1536w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Water_MetalAlkylPrecursor_BufferDosage_2-2048x1371.png 2048w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-6c60694 elementor-widget elementor-widget-n-accordion\" data-id=\"6c60694\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1130\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1130\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications for Charge &amp; Release precursor vaporizer  <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1130\" class=\"elementor-element elementor-element-5b1d3d0 e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"5b1d3d0\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1130\" class=\"elementor-element elementor-element-0fc915b e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"0fc915b\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-58c56f0 wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"58c56f0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">Charge and Release system for 1 or 2 precursors and 1, 2, or more buffer vessels<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">e.g. 2100 x 1600 x 850 \/ 1900 x 800 x 850<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">Typical process parameters: release of 1 mg to 5 g in 2 to 10 seconds; cycle time 10 s to 90 s.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">Up to 2 (more on request)<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">Bis 2 + X<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Additional process gases<\/td><td class=\"wpr-table-td wpr-table-text\">1 + X e.g. nitrogen, H2, argon, silane<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">Possible up to over 200\u00b0C (no MFC)<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Evaporator capacity<\/td><td class=\"wpr-table-td wpr-table-text\">0.5 to 27 l possible<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Buffer vessel capacity<\/td><td class=\"wpr-table-td wpr-table-text\">0.1 l to 30 l possible<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of buffer vessels<\/td><td class=\"wpr-table-td wpr-table-text\">1 + X possible<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Silicon tetrachloride (SiCl\u2084), titanium(IV)-chloride (TiCl\u2084), trichlorosilane (HSiCl\u2083), hexamethyldisiloxane HMDSO (C\u2086H\u2081\u2088OSi\u2082), hexamethyldisilazane HMDS (C\u2086H\u2081\u2089NSi\u2082), chlorotrimethylsilane TMCS (C\u2083H\u2089ClSi), trimethylaluminium TMA (C\u2083H\u2089Al), diethylzinc DEZ (C\u2084H\u2081\u2080Zn), TEOS (C\u2088H\u2082\u2080O\u2084Si), titanium tetrachloride (TiCl\u2084), germanium- tetrachloride (GeCl\u2084), alcohols, water and much more.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar gauge pressure of nitrogen (N\u2082) or argon (purity 5.0 for chlorides 5.6), with inlet filter<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No explosion-proof zones as the system is permanently technically leak-tight<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, spring-return valves in the event of a power failure or emergency stop, ventilation options, gas sensors<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with a heated evaporator compartment and a heated buffer zone<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for refilling during the process, refill trigger via scales, recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, Secure ADS, Profinet, RS485 supported. Triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fc33e7b elementor-widget elementor-widget-image\" data-id=\"fc33e7b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"800\" height=\"949\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V165-010D-TMA-Dimensions-863x1024.webp\" class=\"attachment-large size-large wp-image-3149\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V165-010D-TMA-Dimensions-863x1024.webp 863w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V165-010D-TMA-Dimensions-253x300.webp 253w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V165-010D-TMA-Dimensions-768x911.webp 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V165-010D-TMA-Dimensions.png 921w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1da4214 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"1da4214\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-028aa64\" data-id=\"028aa64\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ba7b8c4 elementor-widget elementor-widget-menu-anchor\" data-id=\"ba7b8c4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_bubbler\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8600842 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"8600842\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Bubbler type precursor vaporizer<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-2b9c314 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"2b9c314\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-1dc3835\" data-id=\"1dc3835\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-0207371 elementor-widget elementor-widget-text-editor\" data-id=\"0207371\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p class=\"translation-block\">Precursor vaporization systems based on the bubbler principle utilize a carrier gas that is passed through the heated vaporization tank and exits the bubbler together with the precursor vapor.<br>They are particularly suitable for processes in which sufficient process pressure cannot be generated by the precursor vapor alone.<\/p><p>Am Eingang des Verdampfers wird der Fluss des Tr\u00e4gergases kontrolliert, w\u00e4hrend am Ausgang der Druck, sowie im Verdampfer die Temperatur gemessen wird. Als kosteng\u00fcnstige alternative zu tr\u00e4gergasfreien Verdampfern ist bei Bubbler-Verdampfersystemen eine geringe Verunreinigung des Precursers, durch das Tr\u00e4gergas hinzunehmen. Der Precursor enth\u00e4lt R\u00fcckst\u00e4nde des Tr\u00e4gergases, da der Precursor kontinuierlich mit dem Tr\u00e4gergas durchstr\u00f6mt wird.<\/p><p>Thanks to its design, the bubbler offers a highly cost-effective overall system for processes where moderate precision is sufficient.<\/p><p>To achieve lower loading rates and enable vaporization at temperatures below ambient, a secondary heat exchanger with a cooling unit can be employed.<\/p><p>Our basic system comprises a bubbler equipped with a carrier gas mass flow controller (MFC) at the inlet and a pressure control unit at the outlet.<\/p><p>We would be happy to configure your system to meet your specific requirements.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-45e4e93 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"45e4e93\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Evaporation using a carrier gas<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Indirect mass flow control<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Pressure stabilization via carrier gas for atmospheric processes and low evaporation temperatures<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Simple design<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Available in standard pack sizes such as DOCK 10, 20, 50 or 100<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Automatic in-process refilling, ideal when used in combination with our G504 precursor refill system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Manufactured from S316L \/ 1.4404, suitable for all common precursors with dry carrier gases<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request, depending on configuration<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Typical lead time: 8 to 16 weeks after order confirmation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2de4ef6 elementor-widget elementor-widget-image\" data-id=\"2de4ef6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"294\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Bubbler_140-1-768x294.png\" class=\"attachment-medium_large size-medium_large wp-image-3002\" alt=\"Precursor Verdampfer Bubbler\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Bubbler_140-1-768x294.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Bubbler_140-1-300x115.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_DirectVaporizer_Bubbler_140-1.png 909w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-376cd2b\" data-id=\"376cd2b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c482c16 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"c482c16\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V140_Bubbler_Weiss_Gerade-768x1024.png\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3001\" alt=\"Precursor Verdampfer Bubbler\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V140_Bubbler_Weiss_Gerade-768x1024.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V140_Bubbler_Weiss_Gerade-225x300.png 225w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V140_Bubbler_Weiss_Gerade.png 1086w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-173dd3f elementor-widget elementor-widget-text-editor\" data-id=\"173dd3f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Bubbler Precursor Verdampfersysteme der SIGA GmbH<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-82a8b10 elementor-widget elementor-widget-n-accordion\" data-id=\"82a8b10\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1370\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1370\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications for bubbler precursor vaporizer system for one or more precursors <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1370\" class=\"elementor-element elementor-element-e763ff6 e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"e763ff6\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1370\" class=\"elementor-element elementor-element-f037182 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"f037182\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0ba15a5 wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"0ba15a5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">Bubbler type precursor vaporizer system<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">From 350 x 600 x 760<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">Typically up to 20 g\/h; other rates depending on precursor available upon request.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">1<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">1 with branching<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Carrier gas<\/td><td class=\"wpr-table-td wpr-table-text\">Typical N2 5.6, up to 2000 sccm<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">Bis 70\u00b0C, h\u00f6here Temperaturen auf Anfrage<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Evaporator capacity<\/td><td class=\"wpr-table-td wpr-table-text\">Capacities from 0.5 to 27 L possible; suitable for standard containers such as DOCK10, 20, 50, or 100<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Silicon tetrachloride (SiCl\u2084), titanium(IV)-chloride (TiCl\u2084), trichlorosilane (HSiCl\u2083), hexamethyldisiloxane HMDSO (C\u2086H\u2081\u2088OSi\u2082), hexamethyldisilazane HMDS (C\u2086H\u2081\u2089NSi\u2082), chlorotrimethylsilane TMCS (C\u2083H\u2089ClSi), trimethylaluminium TMA (C\u2083H\u2089Al), diethylzinc DEZ (C\u2084H\u2081\u2080Zn), TEOS (C\u2088H\u2082\u2080O\u2084Si), titanium tetrachloride (TiCl\u2084), germanium- tetrachloride (GeCl\u2084), alcohols, water and much more.<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar gauge pressure of nitrogen (N\u2082) or argon (purity 5.0 for chlorides 5.6), with inlet filter<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No explosion-proof zones as the system is permanently technically leak-tight<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, spring-return valves in the event of a power failure or emergency stop, ventilation options, gas sensors<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with a heated evaporator<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for refilling during the process, refill trigger via scales, recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, Secure ADS, Profinet, RS485 supported. Triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ccc16d8 elementor-widget elementor-widget-image\" data-id=\"ccc16d8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"783\" height=\"874\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V140-Dimensions.png\" class=\"attachment-large size-large wp-image-3123\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V140-Dimensions.png 783w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V140-Dimensions-269x300.webp 269w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/System-V140-Dimensions-768x857.webp 768w\" sizes=\"(max-width: 783px) 100vw, 783px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-48174b4 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"48174b4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-6a16831\" data-id=\"6a16831\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-c4ecbc7 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"c4ecbc7\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-e90a155\" data-id=\"e90a155\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-acf16a1 elementor-widget elementor-widget-menu-anchor\" data-id=\"acf16a1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_fluessigdosierung\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-646a743 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"646a743\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Liquid dosing followed by evaporation <br>(direct evaporation)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-16bd4e1 elementor-widget elementor-widget-text-editor\" data-id=\"16bd4e1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p class=\"MsoNormal translation-block\">Dosing using a carrier gas is the more precise alternative to using so-called DLI (Direct Liquid Injection) systems or CEM (Controlled Evaporation and Mixing) systems. <br>\nIn this process, both the mass flow rate of the carrier gas and that of the precursor are controlled. The two media are then combined. The liquid is vaporised and transported together with the carrier gas. Various systems exist, some of which utilise the heated carrier gas stream itself to further vaporise any aerosol that has formed.<\/p><p class=\"MsoNormal\">Thanks to precise fluid metering, DLI systems ensure the highest levels of accuracy in both the quantity and composition of the process gases supplied.<\/p><p class=\"MsoNormal\">SIGA GmbH incorporates components from renowned manufacturers into its systems as required. Drawing on our experience and independence, we also combine various precursors and processes within a single system to meet specific customer requirements.<\/p><p>Example: 4-line mixing system<\/p><p class=\"translation-block\">\u2013 Silane from a gas cabinet<br>\n\u2013 HMDSO from a DLI system without carrier gas<br>\n\u2013 TTIP from a DLI system with carrier gas<br>\n\u2013 TMA from a direct evaporator (baking)<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b9df36f elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"b9df36f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Use of established DLI (Direct Liquid Injection) systems from established manufacturers<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">For liquids that are difficult to vaporise or at low temperatures <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Experimental and production systems<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">With (e.g. TTIP) and without a carrier gas (e.g. water)<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Permanently technically leak-proof<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Typical lead time: 12 to 20 weeks after order confirmation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Price on request, depending on configuration<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9767435 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"9767435\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"372\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_Fluessigdosierung_Verdampfung_139-768x372.png\" class=\"attachment-medium_large size-medium_large wp-image-3013\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_Fluessigdosierung_Verdampfung_139-768x372.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_Fluessigdosierung_Verdampfung_139-300x145.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/SIGA_Fluessigdosierung_Verdampfung_139.png 996w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-5eb9329\" data-id=\"5eb9329\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-dba19c4 elementor-widget__width-initial elementor-widget elementor-widget-image\" data-id=\"dba19c4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"629\" height=\"1448\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139_offen_Weiss_ohne_Tueren-1.webp\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3533\" alt=\"Precursor Verdampfer mit verschiedenen Technologien\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139_offen_Weiss_ohne_Tueren-1.webp 629w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139_offen_Weiss_ohne_Tueren-1-130x300.webp 130w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139_offen_Weiss_ohne_Tueren-1-445x1024.webp 445w\" sizes=\"(max-width: 629px) 100vw, 629px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Actual system image, visually enhanced using AI; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-372285c elementor-widget elementor-widget-text-editor\" data-id=\"372285c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>An evaporator and gas mixing system that combines both direct evaporators and two DLI systems<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-a0b6d6e elementor-widget elementor-widget-n-accordion\" data-id=\"a0b6d6e\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;all_collapsed&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1680\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1680\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Technical specifications for liquid dosing followed by evaporation <\/div><\/span>\n\t\t\t\t\t\t\t<span class='e-n-accordion-item-title-icon'>\n\t\t\t<span class='e-opened' ><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-minus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h384c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t\t<span class='e-closed'><svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-plus\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M416 208H272V64c0-17.67-14.33-32-32-32h-32c-17.67 0-32 14.33-32 32v144H32c-17.67 0-32 14.33-32 32v32c0 17.67 14.33 32 32 32h144v144c0 17.67 14.33 32 32 32h32c17.67 0 32-14.33 32-32V304h144c17.67 0 32-14.33 32-32v-32c0-17.67-14.33-32-32-32z\"><\/path><\/svg><\/span>\n\t\t<\/span>\n\n\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1680\" class=\"elementor-element elementor-element-e0d974e e-con-full e-flex wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"e0d974e\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div role=\"region\" aria-labelledby=\"e-n-accordion-item-1680\" class=\"elementor-element elementor-element-8b67de8 e-grid e-con-boxed wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no e-con e-child\" data-id=\"8b67de8\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-fea1795 wpr-data-table-type-csv wpr-table-align-items-left elementor-widget elementor-widget-wpr-data-table\" data-id=\"fea1795\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"wpr-data-table.default\">\n\t\t\t\t\t\n\t\t\t\t\n\t\t<div class=\"wpr-table-container\">\n\t\t<div class=\"wpr-table-inner-container\" data-table-sorting=\"\" data-custom-pagination=\"\" data-row-pagination=\"\" data-entry-info=\"\" data-rows-per-page=\"\">\n\n\t\t<table class=\"wpr-append-to-scope wpr-data-table\"><tbody><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Characteristic<\/td><td class=\"wpr-table-td wpr-table-text\">Example combination for liquid dosing followed by evaporation<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Dimensions H x W x D (mm)<\/td><td class=\"wpr-table-td wpr-table-text\">2100 x 780 x 300<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Delivery rate \/ throughput<\/td><td class=\"wpr-table-td wpr-table-text\">300 sccm HMDSO, 2.5 g\/min TTIP, 100 SCCM TMA, 120 sccm silane<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Number of precursors<\/td><td class=\"wpr-table-td wpr-table-text\">3<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Number of process outlets<\/td><td class=\"wpr-table-td wpr-table-text\">1<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Carrier gas<\/td><td class=\"wpr-table-td wpr-table-text\">Max. 4000 SCCM Argon <\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Evaporation temperature<\/td><td class=\"wpr-table-td wpr-table-text\">50\u00b0C<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Evaporator capacity<\/td><td class=\"wpr-table-td wpr-table-text\">0.7 l each<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Precursor chemicals (others available on request)<\/td><td class=\"wpr-table-td wpr-table-text\">Trimethylaluminum TMA (C3H9Al), hexamethyldisiloxane HMDSO (C6H18OSi2), hexamethyldisilazane HMDS (C6H19NSi2), TTIP tetraisopropyl titanate (C12H28O4Ti), others possible<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Inert gas supply<\/td><td class=\"wpr-table-td wpr-table-text\">100 Nl\/h and 2\u20138 bar g nitrogen (N2) or argon 5.6\/6.0<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Compressed air supply<\/td><td class=\"wpr-table-td wpr-table-text\">5\u20138 bar g<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Supply voltage<\/td><td class=\"wpr-table-td wpr-table-text\">230 V \/ 16 A<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Exhaust air for purging processes<\/td><td class=\"wpr-table-td wpr-table-text\">Approx. 5 l\/min<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Ex zones<\/td><td class=\"wpr-table-td wpr-table-text\">No hazardous zones, as the system is permanently technically sealed and container changes are performed without opening the system.<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Leak tightness<\/td><td class=\"wpr-table-td wpr-table-text\">&lt; 3E-8 mbarl\/s helium, permanently technically leak-tight thanks to metallic face-seal fittings<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Safety<\/td><td class=\"wpr-table-td wpr-table-text\">Safety temperature limiter, emergency stop function, valves closing via spring force upon loss of power or emergency stop, ventilation options, smoke sensor for sealant component<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Design<\/td><td class=\"wpr-table-td wpr-table-text\">Enclosed cabinet with heated evaporator sections in 4 zones<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Refilling<\/td><td class=\"wpr-table-td wpr-table-text\">Connection for refilling during the process, refill trigger via scales, recommended refill system G504<\/td><\/tr><tr class=\"wpr-table-row  wpr-odd\"><td class=\"wpr-table-td wpr-table-text\">Control<\/td><td class=\"wpr-table-td wpr-table-text\">Control via Beckhoff IPC via a local panel and remote interface. Configurable routines for: steam discharge, purging procedures, refilling process, manual mode for maintenance work<\/td><\/tr><tr class=\"wpr-table-row  wpr-even\"><td class=\"wpr-table-td wpr-table-text\">Control interface<\/td><td class=\"wpr-table-td wpr-table-text\">Remote HMI, Secure ADS, Profinet, RS485 supported. Triggering routines, reading sensor data, setting configuration values<\/td><\/tr><\/tbody><\/table><\/div><\/div>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d367458 elementor-widget elementor-widget-image\" data-id=\"d367458\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"591\" height=\"1024\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139-D010A-4-Dimensions-591x1024.webp\" class=\"attachment-large size-large wp-image-3126\" alt=\"\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139-D010A-4-Dimensions-591x1024.webp 591w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139-D010A-4-Dimensions-173x300.webp 173w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/V139-D010A-4-Dimensions.png 655w\" sizes=\"(max-width: 591px) 100vw, 591px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-c9c0eaa elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"c9c0eaa\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-5cc2f84\" data-id=\"5cc2f84\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-beabb08 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"beabb08\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-b95901a\" data-id=\"b95901a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b4a545f elementor-widget elementor-widget-menu-anchor\" data-id=\"b4a545f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_kundenspezifisch\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4508518 elementor-widget__width-initial elementor-widget elementor-widget-heading\" data-id=\"4508518\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Customised precursor vaporizer systems <\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3d3ba83 elementor-widget elementor-widget-text-editor\" data-id=\"3d3ba83\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>We build your customized evaporator solution based on our modular system to meet your specific requirements. We are accustomed to\u2014and look forward to\u2014integrating new components and solutions to provide you with an optimal, efficient result, whether for a series-produced system or a one-off project.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ba3c556 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"ba3c556\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Application-oriented and tailor-made<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Gain a competitive edge with the ideal system for your process  <\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Rapid implementation thanks to a proven modular system<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Hardware, software and security from a single source<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Proven components based on 30 years\u2019 experience<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integration of new components from the market using an established supplier network<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Any combination of different evaporation strategies<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-check\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M173.898 439.404l-166.4-166.4c-9.997-9.997-9.997-26.206 0-36.204l36.203-36.204c9.997-9.998 26.207-9.998 36.204 0L192 312.69 432.095 72.596c9.997-9.997 26.207-9.997 36.204 0l36.203 36.204c9.997 9.997 9.997 26.206 0 36.204l-294.4 294.401c-9.998 9.997-26.207 9.997-36.204-.001z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">We would be happy to provide you with a quotation<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-572243d elementor-widget elementor-widget-image\" data-id=\"572243d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"314\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/08\/Individual-system.png\" class=\"attachment-medium_large size-medium_large wp-image-3483\" alt=\"Precursor Verdampfer induviduelle\" srcset=\"\" sizes=\"(max-width: 768px) 100vw, 768px\" data-srcset=\"\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-cac0f7f\" data-id=\"cac0f7f\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6e21955 elementor-widget elementor-widget-image\" data-id=\"6e21955\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"768\" height=\"576\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Puffersystem_Weiss_mit_Tisch_Vorhang-768x576.png\" class=\"elementor-animation-grow attachment-medium_large size-medium_large wp-image-3014\" alt=\"Precursor Verdampfer kundenspezifisch\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Puffersystem_Weiss_mit_Tisch_Vorhang-768x576.png 768w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Puffersystem_Weiss_mit_Tisch_Vorhang-300x225.png 300w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Puffersystem_Weiss_mit_Tisch_Vorhang-1024x768.png 1024w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Puffersystem_Weiss_mit_Tisch_Vorhang.png 1448w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">AI illustration based on an actual SIGA system image; errors may occur.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-aafb6cc elementor-widget elementor-widget-text-editor\" data-id=\"aafb6cc\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Your process, your system!<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-c85bd36 elementor-section-boxed elementor-section-height-default elementor-section-height-default wpr-particle-no wpr-jarallax-no wpr-parallax-no wpr-sticky-section-no wpr-column-slider-no wpr-equal-height-no\" data-id=\"c85bd36\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-17acb09\" data-id=\"17acb09\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4559266 elementor-widget elementor-widget-menu-anchor\" data-id=\"4559266\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"menu-anchor.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-menu-anchor\" id=\"precursor_verdampfer_general\"><\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-52b42b1 elementor-widget elementor-widget-heading\" data-id=\"52b42b1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Precursor vaporizer<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ad59d1d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"ad59d1d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-99e577a elementor-widget elementor-widget-text-editor\" data-id=\"99e577a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p style=\"font-family: Poppins, sans-serif;\">Precursor vaporizer systems are used to evaporate and meter liquid precursors that are fed into a CVD, PECVD or ALD deposition process as a gas phase. The evaporation and metering of the precursors takes place either via a system without a carrier gas, the direct evaporator or using a carrier gas.<\/p><p style=\"font-family: Poppins, sans-serif;\">Typical applications include the evaporation and metering of water, solvents, silanes, chlorides and metal alkyls such as SiCl\u2084, TiCl\u2084, SiHCl\u2083, HMDSO, DEZ, TMA or TEOS.  Naturally, all other precursors can also be used; we are happy to assess the feasibility of specific precursors and operating ranges. The evaporation systems are frequently used in CVD, PECVD or ALD processes for gas-phase deposition, usually at reduced process pressures (LPCVD) or with plasma assistance (PECVD). Applications also arise at atmospheric process pressures, such as in flame hydrolysis (FHD) or plasma spraying processes.<\/p><p style=\"font-family: Poppins, sans-serif;\">Among the distinctive features of the evaporation systems are, in addition to the ability to evaporate without a carrier gas, the ability to supply multiple consumers from a single evaporator. It is possible both to supply several process chambers simultaneously and to feed precursor vapour into the process chamber at various points.<\/p><p style=\"font-family: Poppins, sans-serif;\">The ability to supply multiple consumers from a single evaporator reduces the number of components, control elements and the space required for installation compared with other designs. Overall, this helps to reduce the costs of maintenance, plant engineering and system integration. Another option is to integrate two evaporators into a single system with a shared control system.\u00a0\u00a0<\/p><p style=\"font-family: Poppins, sans-serif;\"><span style=\"font-weight: bolder; font-size: 1rem;\">Precursor vaporizer\u00a0<\/span><span style=\"font-weight: bolder;\">Direct evaporation systems (baking)<\/span><\/p><p style=\"font-family: Poppins, sans-serif;\">The precursor is fed into a stainless steel tank, the evaporator, where it is regulated to the desired evaporation temperature. The resulting vapour phase is regulated to the set flow rate via a mass flow controller (MFC) and fed into the process. Additional gas streams can be adjusted and fed into the process, irrespective of the required amount of precursor.<\/p><p><strong style=\"font-family: Poppins, sans-serif;\">Precursor Vaporizer - Bubbler type<\/strong><\/p><p>Bubbler systems, on the other hand, utilise a carrier gas flow to deliver the precursor by passing the carrier gas through a reservoir vessel. These systems are simple in design and, when combined with standard containers (e.g. DOCK), provide a cost-effective, reproducible solution within a range of accuracy that is sufficient for many processes. The range of accuracy can be improved by using additional sensors. For example, a humidity sensor can be used in conjunction with a water evaporator to measure the humidity downstream of the bubbler. The required humidity level can be achieved by mixing in dry nitrogen (see AKF humidification stations).<\/p><p>Processes in which accuracy is of the utmost importance should, however, favour direct evaporator systems.<\/p><p style=\"font-family: Poppins, sans-serif;\"><span style=\"font-weight: bold; font-size: 1rem;\">Precursor vaporizer\u00a0<\/span><strong style=\"font-family: Arial, sans-serif; font-size: 1rem;\">DLI systems (Direct Liquid Injection)<\/strong><\/p><p>DLI systems represent another variant. Here, the precursor is evaporated in a metered manner using a liquid flow controller and then mixed with the carrier gas. To enable evaporation at the level of the carrier gas pressure, the gas flow itself is utilised for aerosol formation and evaporation. Process temperatures range from room temperature to well over several hundred degrees Celsius. Owing to the independent flow control of the precursor and carrier gas, these systems achieve a high degree of accuracy in absolute dosing, similar to direct evaporators, but can reach higher maximum pressures.<\/p><p>Such equipment is available on the market from various manufacturers, and we at SIGA GmbH integrate it into our systems as required. However, this complex equipment makes the systems more expensive and must be operated using high-quality media, as replacing the components is considerably more costly than replacing a simple MFC.<\/p><p><span style=\"font-weight: bolder; font-size: 1rem;\">Precursor vaporizer\u00a0<\/span><strong>Charge &amp; Release systems<\/strong><\/p><p>Charge &amp; Release systems dispense without the use of MFCs, based on pressure and volume in a buffer vessel. The buffer vessel is filled with vapour from the evaporator up to a maximum of the current evaporator pressure and then emptied into the process. The dispensed volume can be controlled via pressure differential, temperature and volume. These systems do not require MFCs and allow for the dispensing of small vapour volumes, as required in ALD processes, as well as the short-term delivery of high flow rates. By adjusting the pressure and temperature, as well as using buffer vessels and outlet orifices, reproducible processes can be set up across a wide range of parameters. Furthermore, the systems operate without being limited, for example, by the temperature resistance of MFCs.<\/p><p><span style=\"font-weight: bolder; font-size: 1rem;\">Precursor vaporizer - SIGA GmbH<\/span><\/p><p><span style=\"font-size: 1rem;\">Siga GmbH is capable of designing and installing all types of evaporator systems. Furthermore, where appropriate, we also design combinations of different operating principles in order to achieve the optimal system or come as close to it as possible.<\/span><\/p><p>Our evaporator systems feature metal seals; elastomers are not used within the evaporator system. This fulfils a key requirement for safe operation. The system is designed on a bespoke basis according to the specific requirements of each application. The operating temperature of the evaporator is determined by the process pressure and the vapour pressure of the selected precursor and can, for example, range up to 80\u00b0C or up to 140\u00b0C.<\/p><p>Pressure and temperature within the evaporator are monitored; in the event of overpressure or overtemperature, the evaporator\u2019s heating is switched off. All components carrying precursor vapour are heated. The system is housed in its own enclosure. Pipe trace heating for the vapour line to the process chamber is also fitted if the line pressure so requires.<\/p><p>The pipework and all components in contact with precursor vapour are made of stainless steel, material no. 1.4404, equivalent to SS316L. Face-seal fittings are used, e.g. Swagelok VCR. The utmost importance is attached to ensuring a leak-tight design. Fixed pipe joints are welded using orbital welding under an inert gas atmosphere.<\/p><p>The evaporator can be automatically refilled whilst the process is running. A precursor refill system is used to refill the evaporator. The precursor is stored in a storage vessel and, with the aid of a gas reservoir, is forced out through an immersion tube and fed into the evaporator.<\/p><p>The evaporator is controlled and monitored \u2013 including temperature control and automatic refilling \u2013 by the evaporator control system via a programmable logic controller (PLC) with a touch-screen for visualisation and operation. All functions are regulated by this control system. The setpoint for the MFCs and the selection of the desired gas path are determined by the higher-level control system of the coating plant. Communication is via a Profibus DP or another serial interface. The details of the control system, such as the type of operation with options for manual intervention and communication with the higher-level control system, are adapted to the requirements of the process.<\/p><p><span style=\"font-size: 1rem;\">The evaporator systems are installed in suitable sheet steel enclosures or in standard control cabinets. The control unit and evaporator can be integrated into a single cabinet or installed in two separate cabinets. The configuration can be adapted so that the system can be integrated into the coating plant as effectively as possible and tailored to the requirements at the installation site.<\/span><\/p><p data-start=\"1545\" data-end=\"1918\">The integrated PLC control system with touch screen enables automatic regulation of temperature, pressure and level. Continuous replenishment whilst the process is running can be achieved via an external supply system with a gas reservoir \u2013 reliably and user-friendly. Communication with the main plant takes place via Profinet, Ethernet with SecureADS, RS485 or other industry standards.<\/p><p data-start=\"1545\" data-end=\"1918\">In addition to passive safety elements and enclosed safety components such as safety temperature switches or safety threshold switches, a safety PLC (e.g. TwinSAF) is also used where necessary; this routes safety-critical functions and can interrupt or activate them independently of the actual control programme, based on a logic table derived from a safety assessment.<\/p><p data-start=\"1545\" data-end=\"1918\"><span style=\"font-size: 1rem;\">Safety functions such as shutdown in the event of overpressure or overtemperature are an integral part of the control system. The system can be configured modularly: as a stand-alone solution or as a multi-precursor system with central control. Enclosures made of sheet steel or in explosion-proof designs are available, as is integration into existing control cabinets.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0b8fe06 elementor-icon-list--layout-traditional elementor-list-item-link-full_width elementor-widget elementor-widget-icon-list\" data-id=\"0b8fe06\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Metallic seals and leak-proof: No elastomers in the steam path; orbitally welded stainless steel components (SS316L).<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Heated vapour path: All pipes carrying precursor vapour, including pipe trace heating up to the process chamber, are heated \u2013 no risk of condensation.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-chevron-right\" viewbox=\"0 0 320 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Reduced installation effort: Supplying multiple process points from a single evaporator saves on components, valves, control systems and space.<\/span>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7855a2b elementor-widget__width-inherit elementor-fixed elementor-widget elementor-widget-image\" data-id=\"7855a2b\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;_position&quot;:&quot;fixed&quot;}\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/Weg_Verdampfer_20240808_144653_mit_Systemen_v6_grey.png\" title=\"Weg_Verdampfer_20240808_144653_mit_Systemen_v6_grey\" alt=\"Weg_Verdampfer_20240808_144653_mit_Systemen_v6_grey\" loading=\"lazy\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6df318b elementor-widget elementor-widget-link-in-bio\" data-id=\"6df318b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"link-in-bio.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio e-link-in-bio\">\n\t\t\t<div class=\"e-link-in-bio__content\">\n\n\t\t\t\t\t\t<div class=\"e-link-in-bio__identity\">\n\t\t\t\t\t\t\t\t\t<div class=\"e-link-in-bio__identity-image e-link-in-bio__identity-image-profile has-style-circle\">\n\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"291\" height=\"300\" src=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp\" class=\"e-link-in-bio__identity-image-element\" alt=\"Tobias Metz Gesch\u00e4aftsf\u00fchrer SIGA GmbH\" srcset=\"https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop-291x300.webp 291w, https:\/\/www.sigagmbh.de\/wp-content\/uploads\/2026\/07\/20240412_TobiasMetz_crop.webp 600w\" sizes=\"(max-width: 291px) 100vw, 291px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__bio\">\n\t\t\t\t<h2 class=\"e-link-in-bio__heading\">Dr. Ing. Tobias Metz<\/h2>\t\t\t\t<h3 class=\"e-link-in-bio__title\">Managing Director and Sales<\/h3>\t\t\t\t\t\t\t\t<p class=\"e-link-in-bio__description\">You are welcome to contact me directly regarding your vaporizer system.<\/p>\t\t\t<\/div>\n\t\t\t\t\t<div class=\"e-link-in-bio__icons has-size-small\">\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"Telephone\" class=\"e-link-in-bio__icon-link\" href=\"tel:+49%20176%20220%2099%2099%208\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-phone-alt\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M497.39 361.8l-112-48a24 24 0 0 0-28 6.9l-49.6 60.6A370.66 370.66 0 0 1 130.6 204.11l60.6-49.6a23.94 23.94 0 0 0 6.9-28l-48-112A24.16 24.16 0 0 0 122.6.61l-104 24A24 24 0 0 0 0 48c0 256.5 207.9 464 464 464a24 24 0 0 0 23.4-18.6l24-104a24.29 24.29 0 0 0-14.01-27.6z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a aria-label=\"E-mail\" class=\"e-link-in-bio__icon-link\" href=\"mailto:tobias.metz@sigagmbh.de?subject=Anfrage:%20Verdampfersystem&#038;body=Sehr%20geehrter%20Herr%20Metz,Mit%20freundlichen%20Gr\u00fc\u00dfen,\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-envelope\" viewbox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M502.3 190.8c3.9-3.1 9.7-.2 9.7 4.7V400c0 26.5-21.5 48-48 48H48c-26.5 0-48-21.5-48-48V195.6c0-5 5.7-7.8 9.7-4.7 22.4 17.4 52.1 39.5 154.1 113.6 21.1 15.4 56.7 47.8 92.2 47.6 35.7.3 72-32.8 92.3-47.6 102-74.1 131.6-96.3 154-113.7zM256 320c23.2.4 56.6-29.2 73.4-41.4 132.7-96.3 142.8-104.7 173.4-128.7 5.8-4.5 9.2-11.5 9.2-18.9v-19c0-26.5-21.5-48-48-48H48C21.5 64 0 85.5 0 112v19c0 7.4 3.4 14.3 9.2 18.9 30.6 23.9 40.7 32.4 173.4 128.7 16.8 12.2 50.2 41.8 73.4 41.4z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<div class=\"e-link-in-bio__icon is-size-small\">\n\t\t\t\t\t<a href=\"http:\/\/www.linkedin.com\/in\/tobias-metz-7a51016b\" target=\"_blank\" rel=\"noopener \" aria-label=\"LinkedIn\" class=\"e-link-in-bio__icon-link\">\n\t\t\t\t\t\t<span class=\"e-link-in-bio__icon-svg\">\n\t\t\t\t\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fab-linkedin-in\" viewbox=\"0 0 448 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M100.28 448H7.4V148.9h92.88zM53.79 108.1C24.09 108.1 0 83.5 0 53.8a53.79 53.79 0 0 1 107.58 0c0 29.7-24.1 54.3-53.79 54.3zM447.9 448h-92.68V302.4c0-34.7-.7-79.2-48.29-79.2-48.29 0-55.69 37.7-55.69 76.7V448h-92.78V148.9h89.08v40.8h1.3c12.4-23.5 42.69-48.3 87.88-48.3 94 0 111.28 61.9 111.28 142.3V448z\"><\/path><\/svg>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t<div class=\"e-link-in-bio__ctas has-type-button\">\n\t\t\t\t\t\t\t<a href=\"https:\/\/www.sigagmbh.de\/en\/kontakt\/\" target=\"_blank\" rel=\"noopener \" class=\"e-link-in-bio__cta is-type-button has-corners-rounded\">\n\t\t\t\t\t\t\t\t\t\t<span class=\"e-link-in-bio__cta-text\">\n\t\t\t\t\t\tRequest your vaporizer\t\t\t\t\t<\/span>\n\t\t\t\t<\/a>\n\t\t\t\t\t<\/div>\n\t\t\n\t\t\t<\/div>\n\t\t\t<div class=\"e-link-in-bio__bg\">\n\t\t\t\t<div class=\"e-link-in-bio__bg-overlay\"><\/div>\n\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>","protected":false},"excerpt":{"rendered":"<p>SIGA vaporization systems are designed to precisely supply precursor vapors for CVD and PECVD deposition processes. Vaporization and dosing are achieved through a direct vaporization and dosing system. SIGA offers systems utilizing a wide range of technologies, with or without carrier gas; however, carrier-gas-free systems are one of our key strengths.<\/p>","protected":false},"author":4,"featured_media":3227,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[22,23],"tags":[],"class_list":["post-1765","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-produkt","category-precursor-verdampfer"],"_links":{"self":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/1765","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/users\/4"}],"replies":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/comments?post=1765"}],"version-history":[{"count":62,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/1765\/revisions"}],"predecessor-version":[{"id":4669,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/posts\/1765\/revisions\/4669"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media\/3227"}],"wp:attachment":[{"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/media?parent=1765"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/categories?post=1765"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.sigagmbh.de\/en\/wp-json\/wp\/v2\/tags?post=1765"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}